-
System
Module
Parts No.
Discription
Option
Short Name
-
Robot
Driver
0190-41461
ELE Driver
-
Robot
Driver
0190-08277
ELA Driver
-
Robot
Driver
0190-75052
ESA Driver Lower
-
Robot
Driver
0190-75053
ESA Driver Upper
-
Robot
VHP
-
300mm Shaft
-
Robot
VHP
-
300mm Cap
-
Robot
VHP
0040-03661
Dual robot lower wing
-
Robot
VHP
0040-03662
Dual robot upper wing
-
Robot
VHP
0040-03662
300mm Arm
-
Robot
VHP
0040-03661
300mm Arm
-
Robot
VHP
0040-75906
Right Arm
-
Robot
VHP
0040-75907
Left Arm
-
Robot
VHP
0020-24185
Dual Blade Robot Wing Shaft
-
Robot
VHP
0020-25787
Dual Robot Pivot Arm Cap
-
Robot
VHP
0040-21014
Dual Blade Robot Right Arm
-
Robot
VHP
0040-21013
Dual Blade Robot Left Arm
-
Robot
VHP
0020-25769
Dual Robot Upper Wing
-
Robot
VHP
0020-25770
Dual Robot Lower Wing
-
Robot
VHP
0040-13379
Enhanced HP Arm
-
Robot
VHP
0040-13380
HP Enhanced Arm
-
Robot
VHP
0020-35088
Wing Shaft
-
Robot
VHP
0020-20390
Frog Leg Arm
-
Robot
VHP
0020-70336
Frog Leg Wing
-
Robot
VHP
-
VHP Bearing Cap
-
Robot
VHP
0020-20356
8" Buffer Frog Leg
-
Robot
VHP
0020-21025
8" Transfer Blade Bottom Clamp
-
Robot
VHP
0020-21104
8" Buffer Frog Leg
-
Robot
VHP
0020-21105
8" Blade Bottom Clamp
-
Robot
VHP
-
VHP+ Bearing Cap
-
Robot
VHP
0020-13384
8" Buffer Frog Leg
-
Robot
VHP
0020-75889
8" Buffer Clamp
-
Robot
VHP
0021-37495
BASE. WRIST. INVERTED. MOUNTING EHP-CR ROBOT
-
Robot
VHP
0010-02170
ASSY. LEFT HAND PIVOT AND BEARING
-
Robot
VHP
0010-02171
ASSY. RIGHT HAND PIVOT AND BEARING
-
Robot
VHP
0020-70271
Left Pivot
-
Robot
VHP
0020-70272
Right Pivot
-
Robot
VHP
0020-21028
Blade
-
Robot
VHP
0020-48196
Blade
-
Robot
VHP
0020-53882
Blade
-
Robot
VHP
0020-53883
Blade
-
Robot
VHP
0020-70285
Blade
-
Robot
VHP
0021-76356
Blade
-
Robot
VHP
0010-700652
Dual Blade VHP Robot Cover
-
Robot
VHP
0040-76187
Sensor Bracket with Flag
-
Robot
VHP
0040-76186
Feed Through Clamp
-
Robot
VHP
0020-26676
Bearing Clamp
-
Robot
VHP
0040-21186
Upper Sensor DDR Bracket
-
Robot
VHP
0020-75342
Upper Motor Flag
-
Robot
VHP
0020-76836
DDR Bottom Pie Plate
-
Robot
VHP
0040-76188
DDR Sensor Plate
-
Robot
VHP
0040-21173
Differential Sensor DDR Bracket
-
Robot
VHP
0040-21177
Center DDR Shaft
-
Robot
VHP
0040-21174
Lower Motor Mount
-
Robot
VHP
0040-76197
Upper Motor Mount
-
Robot
VHP
0040-21172
VHP Direct Drive Robot Adapter
-
Robot
VHP
0040-21171
Lower ATM Magnet Ring
-
Robot
VHP
0020-26681
Lower Magnet Ring Clamp
-
Robot
VHP
0040-75030
Upper Magnet Atmosphere Ring
-
Robot
VHP
0040-21170
Upper Magnet Ring Clamp
-
Robot
VHP
0010-76345
Robot Lower Atm Ring Assembly
-
Robot
VHP
0010-76344
Robot Upper Atm Ring Assembly
-
Robot
VHP
0020-20396
Frog Leg Pole Piece
-
Robot
VHP
0020-26383
Dual Robot Soup Bowl
-
Robot
VHP
0020-26190
Dual Robot Ring 8
-
Robot
VHP
0020-26189
Dual Robot Ring 7
-
Robot
VHP
0020-26191
Dual Robot Ring 4
-
Robot
VHP
0020-25773
Dual Robot Ring 3
-
Robot
VHP
0040-21015
Dual Robot Ring 6
-
Robot
VHP
0020-25775
Dual Blade Robot Ring 5
-
Robot
VHP
0040-75247
2 Dual Robot Ring
-
Robot
VHP
0020-25771
1 Dual Robot Ring
-
Robot
VHP
0010-70652
Lower vacuum Ring Assembly
-
Robot
VHP
0010-70651
Upper Vacuum Ring Assembly
-
Robot
HP
0870-01013
DRIVER STPR 5PAHSE HI-SPEED TYPE UPK SERIES
-
Robot
HP
0021-22238
-
Robot
HP
0020-48196
-
Robot
HP
0021-22485
-
Robot
HP
0021-22419
-
Robot
HP
0020-53882
-
Robot
HP
0020-53883
-
Robot
HP
0020-70285
BLADE 8" BUFFER FROG LEG
-
Robot
HP
0020-21028
BLADE 8" TRANSFER FROG LEG
-
Robot
HP
0021-04348
BLADE, PADDED 8" BUFFER FROG LEG ROBOT
-
Robot
HP
0021-35713
BLADE, AL 8" BUFFER W/SLOT ROBOT
-
Robot
HP
0020-21114
BLADE 6" BUFFER ROBOT
-
Robot
HP
0021-76356
BLADE, HP UPGRADE, 6". WITH 8". WRIST INTERFACE
-
Robot
HP
0010-37250
WRIST ASSY, EHP-CR ROBOT
-
Robot
HP
0010-70350
HDP DI ETCH WRIST ASSEMBLY
-
Robot
HP
0010-35004
HTF WRIST ASSEMBLY
-
Robot
HP
0010-20129
BLADE ASSY 6" BUFFER
-
Robot
HP
0010-20129
BLADE ASSY 6" BUFFER
-
Robot
HP
0010-75523
ASSY, HDP EXTENDED ROBOT WRIST 6"/8"
-
Robot
HP
0010-20130
BLADE ASSY 8" BUFFER
-
Robot
HP
0010-13242
ASSEMBLY, EXTENDED REACH WRIST
-
Robot
HP
0010-40307
ASSY, HP+EXTENDED REATCH ROBOT
-
Robot
HP
0010-13267
ASSY, LINKAGE, RIGHT HARD, HP UPGRADE
-
Robot
HP
0020-20390
ARM, FROG LEG
-
Robot
HP
0020-70336
WING FROG LEG
-
Robot
HP
0010-13264
ASSY, OUTER MAGNETS & TUBE, HP ROBOT
-
Robot
HP
0010-37249
ASSY, OUTER MAGNETS & TUBE, ENP-CR ROBOT
