-
System
Module
Parts No.
Discription
Option
Short Name
-
AMAT
WxP
0050-10058
Inactive-Weld Valve Modif, VCR 1/2
-
AMAT
WxP
0010-00685
Actuator Assy STD Cathode
-
AMAT
WxP
0010-00510
Assembly Bearing
-
AMAT
WxP
0290-35871
Config, WXP HeWEB Clamp Chamber, MCVD Centura
-
AMAT
WxP
0010-35511
Assy, PID Controller-R2 Centura
-
AMAT
WxP
0010-10060
Assy, Hinge-Pos B & C Unilid
-
AMAT
WxP
0010-36124
Assy Uni Lid, Chemraz W/Temp PID Controller
-
AMAT
WxP
0020-31831
PLATE ETCH CHAMBER TOP COVER
-
AMAT
WxP
0010-00685
STANDARD CATHODE ACTUATOR ASSEMBLY
-
AMAT
WxP
0010-09968
THROTTLE VALVE ASSEMBLY
MXP,P5000 THROTTLE VALVE
-
AMAT
WxP
0010-10039
HEATED GATE VALVE ASSEMBLY
MXP,P5000 GATE VALVE
-
AMAT
DPS
1270-01842
FULL ATMOSPHERE SWITCH
-
AMAT
DPS
0090-36126
SW,VACUUM,75TORR,VCR-4,CLOSE DECREASING TORR
HALF ATMOSPHERE SWITCH
-
AMAT
DPS
0040-02544
UPPER CHAMBER ASSY DS METAL
-
AMAT
DPS
0010-13833
DPS POLY CHAMBER UUPER ASSEMBLY WITH VITON ORING
DPS POLY UPPER CHAMBER
-
AMAT
DPS
0010-75173
ASSY,SLIT VALVE DOOR & MOUNT, AL W/VTION-ORING
SLIT VALVE DOOR ASSEMBLY
-
AMAT
DPS
0010-75172
ASSY,SLIT VALVE ACTUATOR,NON-ENP
Slit Valve Actuator Assembly
-
AMAT
DPS
3870-02708
VALVE IDA KF25 1/2VCR M/F 316L SST
MANOMETER VALVE
-
AMAT
DPS
0242-02638
DPS METAL LOWER BODY
-
AMAT
DPS
0242-36377
DPS POLY LOWER CHAMBER ASSEMBLY
-
AMAT
DPS
0010-30138
MAIN LIFT ASSEMBLY
-
AMAT
DPS
0010-22277
ASSY, NB 25 SLOT 200MM AUTO HANDER,LLB
NB CASSETTE
-
AMAT
DPS
0010-22256
ASSY, NB 25 SLOT 200MM AUTO HANDER,LLA
NB CASSETTE
-
AMAT
DPS
0010-13143
Universal WBLL CASSETTE PLATFORM ASSEMBLY
-
AMAT
DPS
3870-01708
CRYO GATE VALVE
-
AMAT
DPS
0010-13118
ASY,INDEXER RT AUTOMATED LD LCK
WB AUTOMATED RIGHT INDEXER ASSEMBLY
-
AMAT
DPS
0010-13117
ASY,INDEXER LFT AUTOMATED LD LCK
WB AUTOMATED LEFT INDEXER ASSEMBLY
-
AMAT
DPS
0010-13380
ASSY,INDEXLEFT AUTO LOAD LOCK W/DUMMY CORR RES
NB INDEXER LEFT AUTO LOADLOCK
-
AMAT
DPS
0010-13381
ASSY,INDEXRIGHT AUTO LOAD LOCK W/DUMMY CORR RES
NB INDEXER RIGHT AUTO LOADLOCK ASSEMBLY
-
AMAT
DPS
0010-01507
200MM Ceramic Cathode
-
AMAT
DPS
0021-02450
BRACKET MTG CABLE CONNECTOR ASP+
-
AMAT
DPS
0090-76034
Wafer SENSOR,WFER Present/Wafer Slide Emit
SENSOR ASSEMBLY
-
AMAT
DPS
0010-13149
ASSY.4"WAFER SENSOR LOW PROFILE
Wafer Sensor
-
AMAT
DPS
0000-00000
DTCU Lift Hoist
200mm
-
AMAT
Process Kit
0000-00000
Cathode Assembly
200mm
