-
System
Module
Parts No.
Discription
Option
Short Name
-
TCP 9600
Wafer Transport
853-320030-002
ASSY, OPT SNSR, DARL W/LEAD 145
-
TCP 9600
Wafer Transport
853-320014-002
ASSY, RAIL WFR XPRTSHTL, 9600CFE 141
-
TCP 9600
Wafer Transport
853-320010-003
ASSY, WFR XPRT, GENERIC 9600CFE 137
-
TCP 9600
Wafer Transport
853-190258-003
ASSY, STPR MOT LFTR/SPNR 135
-
TCP 9600
Wafer Transport
853-100173-001
ASSY, ACTUATOR, LINEAR, EDGE SNSR 127
-
TCP 9600
Wafer Transport
853-022500-002
ASSY, SNSR, FBR OPT, PHOTOELECTRC 123
-
TCP 9600
Wafer Transport
853-017633-006
ASSY, OPT SNSR, DRLGTN, 7.00 119
-
TCP 9600
Wafer Transport
853-015766-101
ASSY, FAN, PLENUM, ALUM 111
-
TCP 9600
Wafer Transport
853-012500-003
ASSY, EDGE SNSR 101
-
TCP 9600
Wafer Transport
210-022500-002
SCH, SNSR, FBR OPT, PHOTOELECTRIC 125
-
TCP 9600
Wafer Transport
210-015766-101
SCH, FAN, PLENUM, ALUM 113
-
TCP 9600
Temp Control
846-222258-001
SO, TCU SRVC BX, -40/+80C 669
-
TCP 9600
Strippers
860-347337-002
INSTL, MWAVE STPR, STAND ALONE 421
-
TCP 9600
Strippers
860-030334-001
INSTL, MICROWAVE CLG WTR 405
-
TCP 9600
Strippers
860-025821-497
INSTL, DSQ STPR, 9600CFE 337
-
TCP 9600
Strippers
857-395050-002
KIT, 9600, MICROWAVE STRPR 439
-
TCP 9600
Strippers
857-395050-001
KIT, 9600, DSQ 401
-
TCP 9600
Strippers
853-347387-001
ASSY, CLG WTR, MICROWAVE STPR 435
-
TCP 9600
Strippers
853-347357-002
ASSY, MICROWAVE STPR, IN-HOUSE 429
-
TCP 9600
Strippers
853-347350-001
ASSY, WFR SNSR/TILT SW, MW STPR 427
-
TCP 9600
Strippers
853-347342-001
ASSY, UPR HNG, MICROWAVE STPR 425
-
TCP 9600
Strippers
853-347050-497
ASSY, FL CONT, WVDS, MWAVE 419
-
TCP 9600
Strippers
853-347050-001
ASSY, FL CONT, WVDS 375
-
TCP 9600
Strippers
853-347019-008
ASSY, STRPR MDL, DSQ HNG, 9600SE 369
-
TCP 9600
Strippers
853-160197-001
ASSY, TILT SW, DSQ HNG 363
-
TCP 9600
Strippers
853-160195-002
ASSY, WFR SNSR, MICROWAVESTPR 411
-
TCP 9600
Strippers
853-160195-001
ASSY, WFR SNSR, DSQ HNG 359
-
TCP 9600
Strippers
853-160185-001
ASSY, BRKT, SNSR, DSQ HNG 357
-
TCP 9600
Strippers
853-160184-001
ASSY, UPR HNG, DSQ HNG 355
-
TCP 9600
Strippers
853-034464-002
ASSY, MFC, WTR, MWAVE, HTD, VAP DEL 409
-
TCP 9600
Strippers
853-034464-001
ASSY, MFC, WTR, HTD, VAPOR DLVY 347
-
TCP 9600
Strippers
853-025952-002
ASSY, RF SEN BOX 343
-
TCP 9600
Strippers
853-025950-001
ASSY TRANSF, RF SENSE AUTOTUNE 341
-
TCP 9600
Strippers
853-025736-001
ASSY, COAX, RF MATCH, STRIPPER 329
-
TCP 9600
Strippers
853-025735-008
ASSY, A/T MTCH, STRPR, 9600SE 317
-
TCP 9600
Strippers
853-021635-013
ASSY, MANOM, STPR LL DSQ 307
-
TCP 9600
Strippers
853-011451-002
ASSY, BLO, DSQ STRIPPER 289
-
TCP 9600
Strippers
853-005949-002
ASSY, PLL END POINT DETECTOR 287
-
TCP 9600
Strippers
853-005949-001
ASSY PLL END PT DET 285
-
TCP 9600
Strippers
848-395049-628
FTR, 9600, STRPRS 279
-
TCP 9600
Strippers
848-210357-497
FTR, WFR SIZE, 9600CFE 367
-
TCP 9600
Strippers
810-034802-001
ASSY, PCB, AUTOTUNE, SENSE 351
-
TCP 9600
Strippers
810-017057-001
ASSY, PCB, STRIPPER DIP 297
-
TCP 9600
Strippers
210-160197-001
SCH, TILT SW, DSQ HINGE 365
-
TCP 9600
Strippers
210-160195-002
SCH, WFR SNSR, MICROWAVE STPR 413
-
TCP 9600
Strippers
210-160195-001
SCH, WFR SNSR, DSQ HNG 361
-
TCP 9600
Strippers
210-034802-001
SCH, TCP, AUTOTUNE, SENSE 353
-
TCP 9600
Strippers
210-034464-001
SCH, MFC, WTR, HTD, VAPOR DLVY SYS 349
-
TCP 9600
Strippers
210-025952-002
SCH, RF SENSE BOX 345
-
TCP 9600
Strippers
210-025735-008
SCH, A/T MTCH, STRPR, 9600SE 327
-
TCP 9600
Strippers
210-017057-001
SCH, PCB STRIPPER DIP 301
-
TCP 9600
Strippers
210-011451-002
SCH, BLW, DSQ STRPR 291
-
TCP 9600
SMIF
857-210529-298
KIT, INDXR, SMIF 8", 9600CFE 635
-
TCP 9600
SMIF
857-210529-296
KIT, INDXR, SMIF 6", 9600CFE 629
-
TCP 9600
SMIF
857-210529-108
KIT, INDEX, SMIF 8", 9600CFE, WSI 623
-
TCP 9600
SMIF
857-210529-106
KIT, INDXR, SMIF 6 617
-
TCP 9600
SMIF
857-210289-497
KIT, SMIF WALL MNT UI 9600CFE 615
-
TCP 9600
SMIF
857-210288-497
KIT, SMIF BAL RM UI 9600CFE 613
-
TCP 9600
SMIF
857-190220-001
RTRFT, SMIF, SAM OPT 611
-
TCP 9600
RF
860-030760-608
INSTL, LWR MTCHBX, 9600SE, Q2FY97 281
-
TCP 9600
RF
854-031694-001
ASSY, GEAR, DRIVE MOTOR 173
-
TCP 9600
RF
854-031693-001
ASSY, GEAR CLUSTER 171
-
TCP 9600
RF
854-031692-001
ASSY, CAM LIMIT SWITCH 169
-
TCP 9600
RF
853-370434-002
ASSY, TURBO/RF INTLK 145
-
TCP 9600
RF
853-330588-001
ASSY, TST PT PNL, PWR SPLY, ESC 319
-
TCP 9600
RF
853-330584-060
ASSY, RF COIL, 6 TURN, RD 143
-
TCP 9600
RF
853-330583-080
ASSY, RF COIL, 8 TURN, RD 141
-
TCP 9600
RF
853-330476-001
ASSY, RF FILTER, ESC, 9600 313
-
TCP 9600
RF
853-330473-002
ASSY, PWR SPLY, ESC 9600 311
-
TCP 9600
RF
853-330472-001
ASSY, M BOX EXTN, ESC PWR, 9600 309
-
TCP 9600
RF
853-140138-001
ASSY, LOADCOIL 139
-
TCP 9600
RF
853-034702-001
ASSY, CABLE, TC PROBE J-TYPE 295
-
TCP 9600
RF
853-034121-001
ASSY, FAN AUTOTUNE UPPER 219
-
TCP 9600
RF
853-033776-003
ASSY, XFMR, RF SENSE, 50 TURN 217
-
TCP 9600
RF
853-032190-306
ASSY, UPR MTCH, F/G, 6 TURN COIL 211
-
TCP 9600
RF
853-032190-008
ASSY, UPR MATCH, F/G, 8" 205
-
TCP 9600
RF
853-032168-608
ASSY, INTLK SW, UPPER MATCH 201
-
TCP 9600
RF
853-032167-001
ASSY, FAN, UPR MATCH 197
-
TCP 9600
RF
853-032166-608
ASSY, FEEDTHRU BOX, UPR MATCH 191
-
TCP 9600
RF
853-032165-001
ASSY, RF SENSE BOX, UPR MATCH 187
-
TCP 9600
RF
853-032163-002
ASSY, TILT SW 183
-
TCP 9600
RF
853-032018-608
ASSY, UPR MATCHBOX 181
-
TCP 9600
RF
853-031954-628
ASSY, LWR MATCHBOX, 9600SE, ESC 291
-
TCP 9600
RF
853-031954-608
ASSY, LWR MATCHBOX, 9600SE, BAC 287
-
TCP 9600
RF
853-031953-001
ASSY, FDTHRU BOX, LOWER 283
-
TCP 9600
RF
853-031703-002
ASSY, CAPACITOR DRIVE 175
-
TCP 9600
RF
853-031684-001
ASSY, CAPACITOR DRIVE 163
-
TCP 9600
RF
853-030028-001
ASSY, PLATE, LOADCOIL 161
-
TCP 9600
RF
853-025083-022
ASSY, RF MATCH, ESC, 9600, 2 123
-
TCP 9600
RF
853-017654-012
ASSY, FAN W/SHLD CA, LWR MATCHBX 269
-
TCP 9600
RF
853-015130-204
ASSY, RF MATCH, EXT RANGE 109
-
TCP 9600
RF
853-015130-002
ASSY RF MATCH GEAR DRIVEN 101
-
TCP 9600
RF
810-370182-001
ASSY, PCB, DTRBD, PWR SPLY, ESC 321
-
TCP 9600
RF
810-330490-001
ASSY, PCB, FLTR, ESC 9600 315
-
TCP 9600
RF
810-034829-001
ASSY, PCB, HV DIODE MDL 135
-
TCP 9600
RF
810-034828-002
ASSY, PCB, RF PK DET UPGRADE 131
-
TCP 9600
RF
810-017086-018
ASSY, PCB, ESC PWR SPLY CONFIG 259
-
TCP 9600
RF
810-015987-003
ASSY, PCB, TCP AUTOTUNE, 6TRN 151
-
TCP 9600
RF
210-380060-960
SCH SYS ESC 9600 Q2FY98 325
-
TCP 9600
RF
210-370182-001
SCH, PCB, ESC DTRBD, PWR SPLY, ESC 323