LAM 11 페이지

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LAM

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  • System
    Module
    Parts No.
    Discription
    Option
    Short Name
  • Rainbow 4400
    RF
    853-015130-103
    ASSY, RF, RVM MATCH 15
  • Rainbow 4400
    RF
    810-017086-003
    ASSY, PCB, ESC POWER SUPPLY 107
  • Rainbow 4400
    RF
    810-017083-001
    ESC RF FILTER PCB 103
  • Rainbow 4400
    RF
    810-017032-001
    ASSY PCB RF SENSE 51
  • Rainbow 4400
    RF
    810-017029-001
    ASSY, PCB, D.C. BIAS 23
  • Rainbow 4400
    RF
    810-017003-004
    ASSY, PCB, DIP, HIGH FREQUENCY 41
  • Rainbow 4400
    RF
    210-190216-002
    SCH, ESC/RF, GND PATH 33
  • Rainbow 4400
    RF
    210-190216-001
    SCH, ESC/RF, GND PATH 29
  • Rainbow 4400
    RF
    210-170186-002
    SCH, INTLK SW, SGL 137
  • Rainbow 4400
    RF
    210-027402-010
    SCH, FD-THRU BOX, UPR MATCH, LV 87
  • Rainbow 4400
    RF
    210-025054-002
    SCH, HSG, ESC PWR SPLY 127
  • Rainbow 4400
    RF
    210-017163-201
    SCH, RF SWITCH BOX 55
  • Rainbow 4400
    RF
    210-017086-003
    SCH, PCB, ESC POWER SUPPLY 111
  • Rainbow 4400
    RF
    210-017083-001
    SCH, PCB, ESC RF FILTER 105
  • Rainbow 4400
    RF
    210-017029-001
    SCH, PCB, D.C. BIAS 25
  • Rainbow 4400
    RF
    210-017003-004
    SCH, PCB, DIP, HIGH FREQUENCY 45
  • Rainbow 4400
    RF
    210-015130-103
    SCH, RF MTCH, GR DR 21
  • Rainbow 4400
    Reaction Chamber
    860-010110-440
    INSTL, REAC CHMBR, 4420XL
  • Rainbow 4400
    Reaction Chamber
    857-210380-803
    KIT, 8" ESC MJR FL PREM ELCTD
  • Rainbow 4400
    Reaction Chamber
    857-210380-802
    KIT, 8" ESC NTCH PREMIUMELCTD
  • Rainbow 4400
    Reaction Chamber
    857-210380-801
    KIT, 8" ESC MAJ FL SYS CONFIG
  • Rainbow 4400
    Reaction Chamber
    857-210380-800
    KIT, 8" ESC NTCH SYS CONFIG
  • Rainbow 4400
    Reaction Chamber
    857-210380-603
    KIT, 6" ESC MINOR FL PREM ELCTD
  • Rainbow 4400
    Reaction Chamber
    857-210380-602
    KIT, 6" ESC MAJ FL PREM ELCTD
  • Rainbow 4400
    Reaction Chamber
    857-210380-601
    KIT, 6" ESC MINOR FL SYSCONFIG
  • Rainbow 4400
    Reaction Chamber
    857-210380-600
    KIT, 6" ESC MAJ FL SYS CONFIG
  • Rainbow 4400
    Reaction Chamber
    857-210380-100
    KIT, ESC SYS CONFIG
  • Rainbow 4400
    Reaction Chamber
    856-030939-001
    KIT, RETRO, 4 PIN LFTR, BLWS SEAL
  • Rainbow 4400
    Reaction Chamber
    853-370704-001
    ASSY, HTR CRTG, 150W
  • Rainbow 4400
    Reaction Chamber
    853-370703-001
    ASSY, HTR CRTG, 100W
  • Rainbow 4400
    Reaction Chamber
    853-221367-002
    ASSY, EXT CA, 24VDC, RGA HTR
  • Rainbow 4400
    Reaction Chamber
    853-190614-001
    ASSY, HTR CRTG, 200 W
  • Rainbow 4400
    Reaction Chamber
    853-190613-037
    ASSY, HTR CRTG, 75 W, 37 IN LG
  • Rainbow 4400
    Reaction Chamber
    853-190613-028
    ASSY, HTR CRTG, 75 W, 28 IN LG
  • Rainbow 4400
    Reaction Chamber
    853-180048-003
    ASSY, MANF, W/HYT PORT, HTD, LVD
  • Rainbow 4400
    Reaction Chamber
    853-031764-002
    ASSY, LFTR, BLWS SEAL
  • Rainbow 4400
    Reaction Chamber
    853-031764-001
    ASSY, LIFTER, BELLOWS
  • Rainbow 4400
    Reaction Chamber
    853-031758-001
    ASSY, MANIFOLD PENNING GAGE
  • Rainbow 4400
    Reaction Chamber
    853-030318-002
    ASSY, CHMBR, MNMTR
  • Rainbow 4400
    Reaction Chamber
    853-025065-082
    ASSY, ELCTD CAP, ESC 8" FLATTED
  • Rainbow 4400
    Reaction Chamber
    853-025065-081
    ASSY, ELECTRODE CAP, ESC 8"
  • Rainbow 4400
    Reaction Chamber
    853-025065-065
    ASSY, ELCTD, LWR, ESC, 6", 90 MNRFL
  • Rainbow 4400
    Reaction Chamber
    853-025065-061
    ASSY, ELECTRODE CAP, ESC
  • Rainbow 4400
    Reaction Chamber
    853-021260-002
    ASSY LIMIT SWITCH LIFTER 4620
  • Rainbow 4400
    Reaction Chamber
    853-021260-001
    ASSY LIMIT SWITCH LIFTER 4620
  • Rainbow 4400
    Reaction Chamber
    853-020936-003
    ASSY, UPR SEAL PL, POLY
  • Rainbow 4400
    Reaction Chamber
    853-012095-008
    ASSY EXIT ARM 8 INCH
  • Rainbow 4400
    Reaction Chamber
    853-012095-006
    ASSY EXIT ARM 6 INCH WT
  • Rainbow 4400
    Reaction Chamber
    853-011117-004
    ASSY, HTR, GAP ADJ HSG, LVD, W/TC
  • Rainbow 4400
    Reaction Chamber
    853-001983-011
    ASSY ENDPT DET - DUAL
  • Rainbow 4400
    Reaction Chamber
    853-001983-009
    ASSY ENDPT DET-405/703
  • Rainbow 4400
    Reaction Chamber
    853-001983-008
    ASSY ENDPT DET-703/520
  • Rainbow 4400
    Reaction Chamber
    853-001983-005
    ASSY ENDPT DET - DUAL
  • Rainbow 4400
    Reaction Chamber
    852-140340-002
    ASSY, HSG, UPR CHMBR, 4420XL
  • Rainbow 4400
    Reaction Chamber
    852-140339-002
    ASSY, HSG, LWR CHMBR, 4420XL
  • Rainbow 4400
    Reaction Chamber
    848-210377-001
    FTR, 4420XL CHMBR CONFIG
  • Rainbow 4400
    Reaction Chamber
    848-210061-931
    FEATURE, MNCMTR, ENDPNT DTCR
  • Rainbow 4400
    Reaction Chamber
    810-017006-001
    ASSY PCB TEMP SENSOR
  • Rainbow 4400
    Reaction Chamber
    810-001915-003
    ASSY PCB END POINT DETECTOR 4
  • Rainbow 4400
    Reaction Chamber
    800-140340-002
    ASSY, HSG, UPR CHMBR, 4420XL
  • Rainbow 4400
    Reaction Chamber
    684-094275-001
    CABLE ADAPTER
  • Rainbow 4400
    Reaction Chamber
    210-370704-001
    SCH, HTR CRTG, 150W
  • Rainbow 4400
    Reaction Chamber
    210-370703-001
    SCH, HTR CRTG, 100W
  • Rainbow 4400
    Reaction Chamber
    210-190614-001
    SCH, HTR CRTG, 200 W
  • Rainbow 4400
    Reaction Chamber
    210-017006-001
    SCH, PCB, TEMP SENSOR
  • Rainbow 4400
    Reaction Chamber
    210-011117-004
    SCH, HTR, GAP ADJ HSG, LVD, W/TC
  • Rainbow 4400
    Pressure Control
    860-100223-440
    INSTL, TURBO CONTR 393
  • Rainbow 4400
    Pressure Control
    860-010135-440
    INSTL, VAC/FACIL 379
  • Rainbow 4400
    Pressure Control
    853-190213-001
    ASSY, VLV, SOL, 8 POS, 4420 425
  • Rainbow 4400
    Pressure Control
    853-180145-003
    ASSY, VLV, ANG, HTD, LVD 417
  • Rainbow 4400
    Pressure Control
    853-180074-004
    ASSY, SHLF, TMP CONT SPRT, LVD 411
  • Rainbow 4400
    Pressure Control
    853-180067-003
    ASSY, SEC BYP MANF, HTD, LVD 409
  • Rainbow 4400
    Pressure Control
    853-180066-003
    ASSY, PRI BYP MANF, HTD, LVD 407
  • Rainbow 4400
    Pressure Control
    853-180042-003
    ASSY, MOD VLV, ISO 4 IN, HTD, LVD 405
  • Rainbow 4400
    Pressure Control
    853-180040-003
    ASSY, VLV, ANG, HTD 403
  • Rainbow 4400
    Pressure Control
    853-180033-003
    ASSY, INTCON, MANF, LVD 401
  • Rainbow 4400
    Pressure Control
    848-210091-313
    FTR, BACKING PMP, 4420XL 429
  • Rainbow 4400
    Pressure Control
    810-190212-001
    ASSY, PCB, TURBO INTLK, 4420 419
  • Rainbow 4400
    Pressure Control
    684-092610-001
    CONN, SOLV, SGL 391
  • Rainbow 4400
    Pressure Control
    210-190212-001
    SCH, TURBO INTLK, 4420 421
  • Rainbow 4400
    Pressure Control
    210-100233-440
    SCH, TURBO PMP EMO, 4420XL, LVD 399
  • Rainbow 4400
    Loadlocks
    860-010112-201
    INSTL, ENTRANCE LL 9400 277
  • Rainbow 4400
    Loadlocks
    852-140381-303
    ASSY, LL, ENTR 343
  • Rainbow 4400
    Gas Delivery
    860-170225-001
    INSTL, ORB GAS PNL, 4420XL 283
  • Rainbow 4400
    Gas Delivery
    853-170160-101
    ASSY, ENCL, O/W, GAS PNL, EMC 223
  • Rainbow 4400
    Gas Delivery
    853-024403-102
    ASSY, ORB GAS PNL, EMC 185
  • Rainbow 4400
    Gas Delivery
    250-170260-001
    TREE, FEATURE, MFC, UNIVERSAL 289
  • Rainbow 4400
    Front-end Options
    250-222500-611
    DWG TREE, ENVSN 9400, GEN, A/L 595
  • Rainbow 4400
    Front-end Options
    250-222500-610
    DWG TREE, ENVSN, 4XXX SYS, GEN, AL 593
  • Rainbow 4400
    Front-end Interface
    857-017759-001
    KIT, KEYBOARD, MEMB, IBM-XT 373
  • Rainbow 4400
    Front-end Interface
    852-017758-001
    ASSY, MEMBRANE KYBD WITH SHELF 371
  • Rainbow 4400
    Frame
    860-220120-609
    INSTL, SKIN/COV, 4420XL, ENVSN, AL
  • Rainbow 4400
    Frame
    860-110849-003
    INSTL, SKINS, OPEN CASS, 4420XL
  • Rainbow 4400
    Frame
    860-110472-006
    INSTL, SKINS, SMIF, BLRM, 4420XL
  • Rainbow 4400
    Frame
    860-110439-006
    INSTL, SKINS, SMIF, WLMT, 4420XL
  • Rainbow 4400
    Frame
    860-010136-313
    INSTL, PNEU, 4420XL
  • Rainbow 4400
    Frame
    859-110881-301
    ASSY, JIT FRM, 4420
  • Rainbow 4400
    Frame
    858-110882-301
    INSTL, FEATURE, 4420/XL
  • Rainbow 4400
    Frame
    853-013617-001
    ASSY, VALVE, SMC
  • Rainbow 4400
    Frame
    853-013610-004
    ASSY, SOL TRAY
CEO. LEE HYEONGSEOKBusiness Number. 312-86-64139(161511-0165055)
Address. 90, Sinhyangchon-gil, Seonghwan-eup, Seobuk-gu, Cheonan-si, Chungcheongnam-do, Republic of Korea
TEL. +82-41-583-7231E-mail. chryu@on-semi.co.kr

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