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System
Module
Parts No.
Discription
Option
Short Name
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TCP 9600
RF
210-330490-001
SCH, PCB, FLTR, ESC 9600 317
-
TCP 9600
RF
210-034829-001
SCH, PCB, HV DIODE MDL 137
-
TCP 9600
RF
210-034828-002
SCH, PCB, RF PK DET UPGRADE 133
-
TCP 9600
RF
210-034702-001
SCH, CA, TC PROBE, J-TYPE 297
-
TCP 9600
RF
210-032190-306
SCH, UPR MATCH, FXD GAP, 4"5"&6" 215
-
TCP 9600
RF
210-032190-008
SCH, UPR MATCH, F/G, 8" 209
-
TCP 9600
RF
210-032168-608
SCH, INTLK SW, UPPER MATCH 203
-
TCP 9600
RF
210-032167-001
SCH, FAN, UPR MATCH 199
-
TCP 9600
RF
210-032166-608
SCH, FEEDTHRU BOX, UPPER MATCH 195
-
TCP 9600
RF
210-032165-001
SCH, RF SENSE BOX, UPR MATCH 189
-
TCP 9600
RF
210-032163-002
SCH, TILT, SW UPR MATCH BOX 185
-
TCP 9600
RF
210-031953-001
SCH, FD-THRU BX, LWR MATCH BOX 285
-
TCP 9600
RF
210-031703-002
SCH, CAPACITOR DRIVE 179
-
TCP 9600
RF
210-031684-001
SCHEMATIC, CAPACITOR DRIVE 167
-
TCP 9600
RF
210-025083-022
SCH, RF, MATCH, ESC, 9600, 2 129
-
TCP 9600
RF
210-017654-012
SCH, FAN W/SHLD CA, LWR MATCHBX 271
-
TCP 9600
RF
210-017086-018
SCH PCB ESC PWR SPLY CONFIG 263
-
TCP 9600
RF
210-015987-003
SCH, PCB, TCP UPPR MATCH, 6 TRN 155
-
TCP 9600
RF
210-015130-204
SCH, RF MATCH, EXT RANGE 117
-
TCP 9600
RF
210-015130-002
SCH, RF MATCH, GEAR DRIVEN 107
-
TCP 9600
Reaction Chamber
860-030040-618
INSTL, RCTN CHMBR, 9600SE
-
TCP 9600
Reaction Chamber
857-380068-608
KIT, OPT, HTD ENDPT WDO
-
TCP 9600
Reaction Chamber
857-380067-001
KIT, OPT, NON-HTD ENDPT WDO
-
TCP 9600
Reaction Chamber
857-330941-758
KIT, FXD GAP, 8", 9600 CFE
-
TCP 9600
Reaction Chamber
857-330941-756
KIT, FXD GAP, 6", 9600 CFE
-
TCP 9600
Reaction Chamber
857-330941-755
KIT, FXD GAP, 5", 9600 CFE
-
TCP 9600
Reaction Chamber
857-330941-754
KIT, FXD GAP, 4", 9600 CFE
-
TCP 9600
Reaction Chamber
857-330857-008
KIT, 6cm, FXD GAP, 8in, Q2FY97
-
TCP 9600
Reaction Chamber
857-330857-006
KIT, 6cm, FXD GAP, 6in, Q2FY97
-
TCP 9600
Reaction Chamber
857-330856-008
KIT, 3cm, FXD GAP, 8 in, Q2FY97
-
TCP 9600
Reaction Chamber
857-330856-006
KIT, 3cm, FXD GAP, 6 in, Q2FY97
-
TCP 9600
Reaction Chamber
857-330571-648
KIT, FXD GAP, BAC UNIQUE
-
TCP 9600
Reaction Chamber
857-330570-668
KIT, FXD GAP, ESC UNIQUE
-
TCP 9600
Reaction Chamber
857-030935-008
KIT, SIZING, LWR ELECTRODE, 8"
-
TCP 9600
Reaction Chamber
857-030935-006
KIT, SIZING, LWR ELECTRODE, 6"
-
TCP 9600
Reaction Chamber
857-030935-005
KIT, SIZING, LWR ELECTRODE, 5"
-
TCP 9600
Reaction Chamber
857-030935-004
KIT, SIZING, LWR ELECTRODE, 4"
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TCP 9600
Reaction Chamber
853-370669-606
ASSY, MANF 10 TORR
-
TCP 9600
Reaction Chamber
853-330940-004
TOOL, ALIGN, 4" WFR, W/TAPE
-
TCP 9600
Reaction Chamber
853-330842-056
ASSY, HTR CRTG, 100 WATTS, 56"
-
TCP 9600
Reaction Chamber
853-330842-042
ASSY, HTR CRTG, 100 WATTS, 42"
-
TCP 9600
Reaction Chamber
853-330842-037
ASSY, HTR CRTG, 100 WATTS, 37"
-
TCP 9600
Reaction Chamber
853-330842-032
ASSY, HTR CRTG, 100 WATTS, 32"
-
TCP 9600
Reaction Chamber
853-330842-019
ASSY, HTR CRTG, 100 WATTS, 19"
-
TCP 9600
Reaction Chamber
853-330722-001
ASSY, ROD, CLPG, BAC, JD
-
TCP 9600
Reaction Chamber
853-330721-001
ASSY, ACTR, BAC, JD
-
TCP 9600
Reaction Chamber
853-330582-003
ASSY, INTLK ENCL, MDL HSG
-
TCP 9600
Reaction Chamber
853-330580-618
ASSY, SPLIT, UPR CHMBR, 6cm, 8"
-
TCP 9600
Reaction Chamber
853-330580-616
ASSY, SPLIT, UPR CHMBR, 6cm, 6"
-
TCP 9600
Reaction Chamber
853-330580-318
ASSY, SPLIT, UPR CHMBR, 3cm, 8"
-
TCP 9600
Reaction Chamber
853-330580-316
ASSY, SPLIT, UPR CHMBR, 3CM, 6"
-
TCP 9600
Reaction Chamber
853-330555-608
ASSY, HTR, 25W, ENDPT WDO
-
TCP 9600
Reaction Chamber
853-330546-608
ASSY, JCT, HTD ENDPT
-
TCP 9600
Reaction Chamber
853-330540-682
ASSY, ELCTD, LWR, ESC, 8", FLTD
-
TCP 9600
Reaction Chamber
853-330540-681
ASSY, ELCTD, LWR, ESC, 8", NCH
-
TCP 9600
Reaction Chamber
853-330540-661
ASSY, ELCTD, LWR, ESC, 6", MJR FL
-
TCP 9600
Reaction Chamber
853-330540-082
ASSY, ELCTD, LWR, ESC, 8", FLTD
-
TCP 9600
Reaction Chamber
853-330540-081
ASSY, ELCTD, LWR, ESC, 8", NCH
-
TCP 9600
Reaction Chamber
853-330540-061
ASSY, ELCTD, LWR, ESC, 6", MJR FL
-
TCP 9600
Reaction Chamber
853-330539-001
ASSY, 4 PIN LFTR, BLWS
-
TCP 9600
Reaction Chamber
853-330415-003
ASSY, INTLK ENCL, MDL HSG, LG
-
TCP 9600
Reaction Chamber
853-330412-002
ASSY, TILT, SW
-
TCP 9600
Reaction Chamber
853-140074-601
ASSY, ELCTD, BLWS, FIX GAP, 9600
-
TCP 9600
Reaction Chamber
853-031499-608
ASSY, HEATER CARTRIDGE, 150W
-
TCP 9600
Reaction Chamber
853-031498-608
ASSY, HEATER CARTRIDGE, 100W
-
TCP 9600
Reaction Chamber
853-031457-011
ASSY, MANOM, 100 m TORR
-
TCP 9600
Reaction Chamber
853-031456-608
ASSY, MANF, MANOM, 100 mTORR
-
TCP 9600
Reaction Chamber
853-031399-001
ASSY, MNMTR, 10TORR
-
TCP 9600
Reaction Chamber
853-029493-002
ASSY, RGA/PENN PORT W MONO
-
TCP 9600
Reaction Chamber
853-001983-110
ASSY, ENDPNT DET-DUAL, 740/261
-
TCP 9600
Reaction Chamber
852-330148-618
ASSY, HSG, MDL CHMBR, 6CM
-
TCP 9600
Reaction Chamber
852-330148-318
ASSY, HSG, MDL CHMBR, 3 CM
-
TCP 9600
Reaction Chamber
852-330143-608
ASSY, HSG, UPR CHMBR
-
TCP 9600
Reaction Chamber
852-030038-668
ASSY, HSG, LWR CHMBR, F/G, ESC
-
TCP 9600
Reaction Chamber
852-030038-648
ASSY, HSG, LWR CHMBR, F/G, BAC
-
TCP 9600
Reaction Chamber
848-210361-298
FTR, CHMBR CONFIG, 9600 F/G
-
TCP 9600
Reaction Chamber
848-210343-298
FTR, ESC/BAC, 9600 F/G
-
TCP 9600
Reaction Chamber
848-210061-011
FTR, OPTS, ENDPT/MNCMTR, Q2FY97
-
TCP 9600
Reaction Chamber
846-030919-002
KIT, MONOCHROMETER ASSY TCPII
-
TCP 9600
Reaction Chamber
842-331033-001
KIT SP CHMBR LINER 9600SE
-
TCP 9600
Reaction Chamber
800-390111-001
ASSY, DP GA
-
TCP 9600
Reaction Chamber
800-030038-668
ASSY, HSG, LWR CHMBR, F/G, ESC
-
TCP 9600
Reaction Chamber
800-030038-648
ASSY, HSG, LWR CHMBR, F/G, BAC
-
TCP 9600
Reaction Chamber
372 TCP 960SE
Drawing & Schematics, Volume 1 (Revision C)
-
TCP 9600
Reaction Chamber
210-330555-608
SCH, HTR, 25WATT, ENDPT WDO 565
-
TCP 9600
Reaction Chamber
210-330412-002
SCH, TILT SW 449
-
TCP 9600
Reaction Chamber
210-031499-608
SCH, HEATER CARTRIDGE, 150W
-
TCP 9600
Reaction Chamber
210-031498-608
SCH, HEATER CARTRIDGE, 100W
-
TCP 9600
Reaction Chamber
210-031456-001
SCH, CHAMBER MANOMETER MNFLD
-
TCP 9600
Reaction Chamber
210-031399-001
SCH, MANOM, 10TORR
-
TCP 9600
Reaction Chamber
210-029493-002
SCH, RGA/PENN, 9400 W MONOCHRMTR
-
TCP 9600
Pressure Control
860-032902-298
INSTL, VAC FAC, 9600CFE, PMP OPT 585
-
TCP 9600
Pressure Control
857-380201-002
KIT, ALCATEL 1.3K, CE 655
-
TCP 9600
Pressure Control
857-380201-001
KIT, SEIKO SEIKI, 1K, L/S BOLTEDF 653
-
TCP 9600
Pressure Control
853-380126-002
ASSY, ELB, HTD, WLDMT, FORELINE 651
-
TCP 9600
Pressure Control
853-370737-497
ASSY, HTR, MNFLD, R, BYPASS 647
-
TCP 9600
Pressure Control
853-350012-497
ASSY, CHMBR BLST, HTD, W/JCT BOX 639
-
TCP 9600
Pressure Control
853-347283-001
ASSY, BHD, WTR VAPOR DLVYSYS 635
-
TCP 9600
Pressure Control
853-347279-001
ASSY, TK, WTR VAPOR DLVY SYS 629
-
TCP 9600
Pressure Control
853-347274-001
ASSY, SEC WTR CNTMT, WVDS 623