LAM 3 페이지

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Tel) +82-41-583-7231
chryu@on-semi.co.kr

LAM

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  • System
    Module
    Parts No.
    Discription
    Option
    Short Name
  • TCP 9600
    Pressure Control
    853-033271-608
    ASSY, ADPTR, HTD 607
  • TCP 9600
    Pressure Control
    853-032983-608
    ASSY, ISLTN ANGLE VALVE, HTD 605
  • TCP 9600
    Pressure Control
    853-032938-497
    ASSY, MNFLD R, BYPASS, HTD, W/JBOX 603
  • TCP 9600
    Pressure Control
    853-032926-002
    ASSY, STRAP, ALCATEL TMP 601
  • TCP 9600
    Pressure Control
    853-032926-001
    ASSY, STRAP TURBO SHIPPING 599
  • TCP 9600
    Pressure Control
    853-032908-608
    ASSY, ISO ANGLE VALVE, HTD 597
  • TCP 9600
    Pressure Control
    853-031399-002
    ASSY, MNMTR, 10TORR 583
  • TCP 9600
    Pressure Control
    848-331052-001
    FEATURE, TURBO PUMP, 9600CFE 621
  • TCP 9600
    Pressure Control
    810-330658-002
    ASSY, PCB, TURBO/RF INTLKBD 613
  • TCP 9600
    Pressure Control
    810-034831-001
    ASSY, PCB, I/O, B/O, ALCATEL-TB 609
  • TCP 9600
    Pressure Control
    210-347279-001
    SCK, TK, WTR VAPOR DLVY SYS 633
  • TCP 9600
    Pressure Control
    210-330658-002
    SCH, PCB, TURBO/RF INTLK BD 617
  • TCP 9600
    Pressure Control
    210-034831-001
    SCH, I/O, B/O, ALCATEL-TB 611
  • TCP 9600
    Loadlocks
    860-011260-298
    INSTL, EXIT LL, 9600 CFE 211
  • TCP 9600
    Loadlocks
    860-010112-298
    INSTL, ENTR LL, 9600CFE 203
  • TCP 9600
    Loadlocks
    857-025730-758
    KIT, WFR SIZING, EXIT LL, DSQ, 8" 287
  • TCP 9600
    Loadlocks
    857-025730-756
    KIT, WFR SIZING, EXIT LL, DSQ, 6" 285
  • TCP 9600
    Loadlocks
    857-025730-755
    KIT, WFR SIZING, EXIT LL, DSQ, 5" 283
  • TCP 9600
    Loadlocks
    857-025730-754
    KIT, WFR SIZING, EXIT LL, DSQ, 4" 281
  • TCP 9600
    Loadlocks
    854-021767-002
    ASSY, SFT, ARM DR, ISOTPC ETCH 271
  • TCP 9600
    Loadlocks
    853-370846-001
    ASSY, ESC INTERLOCK SWITCH 359
  • TCP 9600
    Loadlocks
    853-370783-004
    MOD, ASSY, CONT, HTD COV, ENTRLL 357
  • TCP 9600
    Loadlocks
    853-370775-002
    ASSY, CONT, HTD COV, ELL 351
  • TCP 9600
    Loadlocks
    853-360272-002
    ASSY, HTD ENTRANCE LOAD LOCK 347
  • TCP 9600
    Loadlocks
    853-347413-008
    ASSY, HTD PDL, STPR, IMPRVSPRT, 8 343
  • TCP 9600
    Loadlocks
    853-347413-006
    ASSY, HTD PDL, STPR, IMPRVSPRT, 6 339
  • TCP 9600
    Loadlocks
    853-347413-005
    ASSY, HTD PDL, STPR, IMPRVSPRT, 5 335
  • TCP 9600
    Loadlocks
    853-347413-004
    ASSY, HTD PDL, STPR, IMPRVSPRT, 4 331
  • TCP 9600
    Loadlocks
    853-347147-008
    ASSY, HTD PDL, PLSH&PLTD, HDWR, 8" 329
  • TCP 9600
    Loadlocks
    853-347147-006
    ASSY, HTD PDL, PLSH&PLTD, HDWR, 6" 327
  • TCP 9600
    Loadlocks
    853-347147-005
    ASSY, HTD PDL, PLSH&PLTD, HDWR, 5" 325
  • TCP 9600
    Loadlocks
    853-347147-004
    ASSY, HTD PDL, PLSH&PLTD, HDWR, 4" 323
  • TCP 9600
    Loadlocks
    853-347038-002
    ASSY, SNSR, LFTR, STRPR 321
  • TCP 9600
    Loadlocks
    853-034395-002
    ASSY, OPT SNSR, LFTR, STRPR 297
  • TCP 9600
    Loadlocks
    853-032776-605
    ASSY, LFTR, STRPR, Q3FY96 295
  • TCP 9600
    Loadlocks
    853-025767-003
    ASSY, FDTHRU, BLTIN FLTR, COATED 289
  • TCP 9600
    Loadlocks
    853-025730-298
    ASSY, EXIT LL, 9600 CFE 277
  • TCP 9600
    Loadlocks
    853-021819-002
    ASSY, ARM HOUSING, RED HEIGHT 275
  • TCP 9600
    Loadlocks
    853-021818-002
    ASSY, SPINDLE, RED HEIGHT 273
  • TCP 9600
    Loadlocks
    853-021631-003
    ASSY, STPR MOT, LFTR, STRPR 267
  • TCP 9600
    Loadlocks
    853-012875-002
    ASSY, GATE DRIVE, INNER, 9600 251
  • TCP 9600
    Loadlocks
    853-012200-004
    ASSY, GATE, DR, INR, 9600 241
  • TCP 9600
    Loadlocks
    853-012175-003
    ASSY, ARM DR(HMNC)9600 SMIF CON 227
  • TCP 9600
    Loadlocks
    852-011200-298
    ASSY, LL, ENTR, W HEATED CVR, 9600 207
  • TCP 9600
    Loadlocks
    210-025767-003
    SCH, FDTHRU, BLTIN FLTR, COATED 293
  • TCP 9600
    Loadlocks
    210-021631-003
    SCH, STPR MOT, LFTR, STRPR 269
  • TCP 9600
    Indexers
    857-210529-492
    KIT, INDEX, O/C, 9600CFE, WSI 197
  • TCP 9600
    Indexers
    857-210529-291
    KIT, INDXR, O/C, 9600CFE 191
  • TCP 9600
    Indexers
    853-031032-498
    ASSY, SHTL, 9600CFE, WSI 183
  • TCP 9600
    Indexers
    853-031032-497
    ASSY, SHTL, 9600CFE 179
  • TCP 9600
    Indexers
    853-015761-102
    ASSY, SL, SW, 4600, CHUCK 167
  • TCP 9600
    Indexers
    853-015761-101
    ASSY, SL, SW, 4600, INDEXER 165
  • TCP 9600
    Indexers
    853-015760-002
    ASSY, OPT SNSR, 9600 163
  • TCP 9600
    Indexers
    853-015753-001
    ASSY MOTOR STEPPER ARMDRIVE 159
  • TCP 9600
    Indexers
    848-210504-497
    FTR, INDXR, 9600CFE 189
  • TCP 9600
    Indexers
    210-015760-001
    SCH, OPTICAL SENSOR, 4600 161
  • TCP 9600
    Gas Delivery
    860-030766-298
    INSTL, ORB GAS PNL, 9600CFE 407
  • TCP 9600
    Gas Delivery
    859-190206-104
    KIT, CA ASSY, ORB GAS PNL, 9600 477
  • TCP 9600
    Gas Delivery
    859-170229-001
    KIT, JIT, GAS PNL EXT BOX, Q2FY97 449
  • TCP 9600
    Gas Delivery
    859-170228-002
    KIT, JIT, BTNUP#2, ORB GASPANEL 447
  • TCP 9600
    Gas Delivery
    853-350119-001
    ASSY, WLDMNT, MANF CHMBR 497
  • TCP 9600
    Gas Delivery
    853-350024-497
    ASSY, BLKHD, HTD, SHORT, W/JCT BOX 495
  • TCP 9600
    Gas Delivery
    853-350019-497
    ASSY, WLDMT, He EVAC/CHMBR, J BOX 493
  • TCP 9600
    Gas Delivery
    853-347282-001
    ASSY, PRI L, HTD, WVDS, CONTD 489
  • TCP 9600
    Gas Delivery
    853-347066-002
    ASSY, DLVY LINE, HTD, WVDS 485
  • TCP 9600
    Gas Delivery
    853-190080-011
    ASSY, HE MANOM 473
  • TCP 9600
    Gas Delivery
    853-170232-101
    ASSY, COV, EXT BOX, L, 9600 465
  • TCP 9600
    Gas Delivery
    853-170232-100
    ASSY, COV, EXT BOX, R, 9600 461
  • TCP 9600
    Gas Delivery
    853-170231-101
    ASSY, COV, ANGLED, EXT BOX, L, 9600 457
  • TCP 9600
    Gas Delivery
    853-170231-100
    ASSY, COV, ANGLED, EXT BOX, R, 9600 453
  • TCP 9600
    Gas Delivery
    853-170230-001
    ASSY, BOX, EXT, BTM SCRUBBED, 9600 451
  • TCP 9600
    Gas Delivery
    853-170227-001
    ASSY, COV DTRBD W/SCRN 445
  • TCP 9600
    Gas Delivery
    853-170201-100
    ASSY, HELIUM CONT, ADV 443
  • TCP 9600
    Gas Delivery
    853-170190-609
    KIT, JIT, ORB GS PNL, 9600 441
  • TCP 9600
    Gas Delivery
    853-170183-100
    ASSY, VENT, LL 439
  • TCP 9600
    Gas Delivery
    853-170181-100
    ASSY, WLDMT, MXG MANF, LL 435
  • TCP 9600
    Gas Delivery
    853-170176-100
    ASSY, WLDMT, MANF, DLVY 431
  • TCP 9600
    Gas Delivery
    853-170172-100
    ASSY, WLDMT, PRI SHUTOFF 425
  • TCP 9600
    Gas Delivery
    853-170160-608
    ASSY, ENCL, ORB GAS PNL, Q2FY97 421
  • TCP 9600
    Gas Delivery
    853-024402-298
    ASSY, ORB GAS PNL, 9600CFE 379
  • TCP 9600
    Gas Delivery
    853-017620-002
    ASSY, TRI CNVCTRN INTFC 377
  • TCP 9600
    Gas Delivery
    853-017480-005
    ASSY, VAC SW, 330 TORR 375
  • TCP 9600
    Gas Delivery
    810-017075-003
    PCB, ORBITAL WELD, GAS PNL INT 2 351
  • TCP 9600
    Gas Delivery
    810-017007-002
    ASSY, PCB, CNVCTRN TUBE INTFC 337
  • TCP 9600
    Gas Delivery
    210-347282-001
    SCH, PRI L, HTD, WVDS 491
  • TCP 9600
    Gas Delivery
    210-347066-002
    SCH, DLVY LINE, HTD, WVDS 487
  • TCP 9600
    Gas Delivery
    210-190080-011
    SCH, HE MANOM, EMC 475
  • TCP 9600
    Gas Delivery
    210-017075-003
    SCH, PCB, ORB WLD GAS PNLINTFC 353
  • TCP 9600
    Gas Delivery
    210-017007-002
    SCH, PCB, CNVCTRN TUBE INTFC 339
  • TCP 9600
    Front-end Options
    860-222777-006
    INSTL, ULPA FLTR, MWAVE 9600, A/L 537
  • TCP 9600
    Front-end Options
    860-220114-612
    INSTL, A/L ENVSN 9600 483
  • TCP 9600
    Front-end Options
    857-222841-600
    KIT, A/L, 9600 CFE, ENVSN 543
  • TCP 9600
    Front-end Options
    857-210423-497
    KIT, OPEN CASS (HINE) 9600CFE 471
  • TCP 9600
    Front-end Options
    853-222923-001
    ASSY, PNL, R, ULPA 9600GF, ENVSN A 545
  • TCP 9600
    Front-end Options
    853-222226-002
    ASSY, VLV, SOL, A/L, ENVSN, 9600 501
  • TCP 9600
    Front-end Options
    853-190469-003
    ASSY, CND AC PWR, ENVSN 9600 A/L 437
  • TCP 9600
    Front-end Options
    848-210461-497
    FTR, 9600CFE, UI/AUTOMN 473
  • TCP 9600
    Front-end Options
    684-091547-001
    CONNECTOR, SOLENOID VALVE, SGL 409
  • TCP 9600
    Front-end Options
    250-222500-612
    DWG TREE, ENVSN 9600 GEN, A/L 527
  • TCP 9600
    Frame
    860-310075-013
    INSTL, SKINS & PLSTC, O/CCFE
CEO. LEE HYEONGSEOKBusiness Number. 312-86-64139(161511-0165055)
Address. 90, Sinhyangchon-gil, Seonghwan-eup, Seobuk-gu, Cheonan-si, Chungcheongnam-do, Republic of Korea
TEL. +82-41-583-7231E-mail. chryu@on-semi.co.kr

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