LAM 5 페이지

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LAM

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  • System
    Module
    Parts No.
    Discription
    Option
    Short Name
  • Rainbow 4500i
    ISO Chamber
    853-021903-002
    ISO Chamber Fan Assy
  • Rainbow 4500i
    ISO Chamber
    853-021819-001
    ARM HSG Rdcd HT. ISO
  • Rainbow 4500i
    ISO Chamber
    853-021635-011
    ISO Manometer 10T
  • Rainbow 4500i
    ISO Chamber
    853-021635-001
    ISO Manometer
  • Rainbow 4500i
    ISO Chamber
    853-017933-001
    Harm. Arm Drive Cable (D14)
  • Rainbow 4500i
    ISO Chamber
    853-012123-001
    Harmonic Arm Drive (D14)
  • Rainbow 4500i
    ISO Chamber
    849-020354-001
    ELL QPM Kit
  • Rainbow 4500i
    ISO Chamber
    849-020348-001
    ISO Annual PM Kit
  • Rainbow 4500i
    ISO Chamber
    839-021887-002
    ISO Gas Deliv. Line w/filter
  • Rainbow 4500i
    ISO Chamber
    839-012255-001
    Inner Gate Bellows
  • Rainbow 4500i
    ISO Chamber
    810-017050-003
    ADIO #10
  • Rainbow 4500i
    ISO Chamber
    796-006238-011
    AC-2 Cont. ISO Chamber
  • Rainbow 4500i
    ISO Chamber
    771-090453-002
    Convectron Tube ISO (new)
  • Rainbow 4500i
    ISO Chamber
    734-090788-001
    Paddle feedthru Oring
  • Rainbow 4500i
    ISO Chamber
    734-090704-001
    Gas Feedthru Oring
  • Rainbow 4500i
    ISO Chamber
    734-090690-001
    Belljar Baseplate Oring
  • Rainbow 4500i
    ISO Chamber
    734-008179-001
    Harmonic Drive Quadring
  • Rainbow 4500i
    ISO Chamber
    734-007460-001
    Door Oring (x2)
  • Rainbow 4500i
    ISO Chamber
    734-007369-001
    Arm Post Quadring
  • Rainbow 4500i
    ISO Chamber
    734-007335-001
    Harm Drive Shaft Oring
  • Rainbow 4500i
    ISO Chamber
    734-007333-001
    Harmonic Drive Oring
  • Rainbow 4500i
    ISO Chamber
    720-093815-006
    Spider Baffle Vspl Flt scrws X 4
  • Rainbow 4500i
    ISO Chamber
    720-093814-008
    Vespel Screws spider skt hd X 4
  • Rainbow 4500i
    ISO Chamber
    720-092758-010
    Baffle Vespel Screws X 4
  • Rainbow 4500i
    ISO Chamber
    716-160255-002
    Belljar Sleeve
  • Rainbow 4500i
    ISO Chamber
    716-021886-002
    Belljar sleeve Oring
  • Rainbow 4500i
    ISO Chamber
    716-021883-001
    Belljar Sleeve Gasket
  • Rainbow 4500i
    ISO Chamber
    716-021879-001
    Cooling Duct, Electrode, ISO
  • Rainbow 4500i
    ISO Chamber
    716-021856-001
    Arm Housing Oring
  • Rainbow 4500i
    ISO Chamber
    715-130063-106
    Reduced Notch Wafer holder
  • Rainbow 4500i
    ISO Chamber
    714-021881-002
    ISO Top RF Electrode (back)
  • Rainbow 4500i
    ISO Chamber
    714-021881-001
    ISO Top RF Electrode (front)
  • Rainbow 4500i
    ISO Chamber
    713-021875-001
    Spider baffle Clamp X 3
  • Rainbow 4500i
    ISO Chamber
    713-012157-001
    Arm Hub Spacer (brown)
  • Rainbow 4500i
    ISO Chamber
    660-024637-008
    Generator AE (ISO)
  • Rainbow 4500i
    ISO Chamber
    660-021964-001
    ISO RF Match
  • Rainbow 4500
    Wafer Transport
    860-430011-003
    INSTL, WFR TR GENERIC 183
  • Rainbow 4500
    Wafer Transport
    857-210503-018
    KIT, INSTL, INDXR, SMIF 8", WSI 249
  • Rainbow 4500
    Wafer Transport
    857-210503-016
    KIT, INSTL, INDXR, SMIF 6", WSI 241
  • Rainbow 4500
    Wafer Transport
    857-210503-008
    KIT, INSTL, INDEX ENV SMIF 8" 233
  • Rainbow 4500
    Wafer Transport
    857-210503-006
    KIT, INSTL, INDEX ENV SMIF 6" 225
  • Rainbow 4500
    Wafer Transport
    857-210503-003
    KIT, INSTL, INDXR, 0/C, WSI 217
  • Rainbow 4500
    Wafer Transport
    857-210503-002
    KIT, INSTL, 48RA INDXR ENV 209
  • Rainbow 4500
    Wafer Transport
    857-210503-001
    KIT, INSTL, INDXR, ENV, OPEN CASS 201
  • Rainbow 4500
    Wafer Transport
    853-320030-007
    ASSY, OPT SNSR, DARL W/LEADS 181
  • Rainbow 4500
    Wafer Transport
    853-320030-006
    ASSY, OPT SNSR, DARL W/LEADS 179
  • Rainbow 4500
    Wafer Transport
    853-210624-008
    ASSY, WFR HLDR, T-PKT, 8" 175
  • Rainbow 4500
    Wafer Transport
    853-210624-006
    ASSY, WFR HLDR, T-PKT, 6" 173
  • Rainbow 4500
    Wafer Transport
    853-210624-005
    ASSY, WFR HLDR, T-PKT, 5" 171
  • Rainbow 4500
    Wafer Transport
    853-190258-001
    ASSY, MTR, STPR, LFTR/SPNR 163
  • Rainbow 4500
    Wafer Transport
    853-130183-001
    ASSY, ARM, SPATULA MOUNTING 199
  • Rainbow 4500
    Wafer Transport
    853-130176-001
    ASSY, STPR MTR, PUSH/PULLCONN 161
  • Rainbow 4500
    Wafer Transport
    853-130027-004
    ASSY, EDGE SNSR 159
  • Rainbow 4500
    Wafer Transport
    853-130026-002
    ASSY, MOTOR, STEPPER 157
  • Rainbow 4500
    Wafer Transport
    853-130010-003
    ASSY, ACTR, SHTL, SHORT 155
  • Rainbow 4500
    Wafer Transport
    853-130009-004
    ASSY, WFR XPRT, GENERIC 151
  • Rainbow 4500
    Wafer Transport
    853-022500-001
    ASSY, SNSR, MINI-BEAM FIBEROPTIC 147
  • Rainbow 4500
    Wafer Transport
    853-017645-102
    ASSY, FAN, INDEXER (RECEIVE) 195
  • Rainbow 4500
    Wafer Transport
    853-017645-101
    ASSY, FAN, INDEXER (SEND) 191
  • Rainbow 4500
    Wafer Transport
    853-017644-101
    ASSY, FAN, PLENUM 143
  • Rainbow 4500
    Wafer Transport
    853-017633-002
    ASSY, OPT, SNSR, DRLGTN, 3.00 139
  • Rainbow 4500
    Wafer Transport
    853-015762-001
    ASSY SWITCH VACUUM 133
  • Rainbow 4500
    Wafer Transport
    853-012600-102
    ASSY, INDEXER, RECEIVE, HINE 189
  • Rainbow 4500
    Wafer Transport
    853-012600-101
    ASSY, INDEXER, SEND, HINE 187
  • Rainbow 4500
    Wafer Transport
    853-012525-002
    ASSY, LFTR/SPNR, 1.50 DIA 129
  • Rainbow 4500
    Wafer Transport
    848-210624-001
    FTR, WFR HLDR, 4520 GF 169
  • Rainbow 4500
    Wafer Transport
    848-210504-001
    FTR, INDR ENV OPN CASS/SMIF/AL 167
  • Rainbow 4500
    Wafer Transport
    810-017071-001
    ASSY, PCB, EDGE DETECTOR BRKOUT 135
  • Rainbow 4500
    Wafer Transport
    210-320030-001
    SCH, OPT SNSR, DARL, SHTL ARM/LD 177
  • Rainbow 4500
    Wafer Transport
    210-190258-001
    SCH, MTR, STPR, LFTR/SPNR 165
  • Rainbow 4500
    Wafer Transport
    210-022500-001
    SCH, SENSOR, MINI-BEAM 149
  • Rainbow 4500
    Wafer Transport
    210-017645-102
    SCH, FAN, INDEXER (RECEIVE) 197
  • Rainbow 4500
    Wafer Transport
    210-017645-101
    SCH, FAN, INDEXER (SEND) 193
  • Rainbow 4500
    Wafer Transport
    210-017644-101
    SCH, FAN, PLENUM 145
  • Rainbow 4500
    Wafer Transport
    210-017633-XXX
    SCH, OPTICAL SENSOR 141
  • Rainbow 4500
    Wafer Transport
    210-017071-001
    SCH, PCB, EDGE DETECTOR BREAKOUT 137
  • Rainbow 4500
    Temp Control
    857-110201-001
    KIT, SKINS, 2080 635
  • Rainbow 4500
    Temp Control
    853-111053-002
    ASSY, CONDENSER, LWR 663
  • Rainbow 4500
    Temp Control
    853-111053-001
    ASSY, CONDENSER, UPR 661
  • Rainbow 4500
    Temp Control
    853-110997-003
    ASSY, VLV, SOL, 2-WAY, NO 659
  • Rainbow 4500
    Temp Control
    853-110877-001
    ASSY, 2080, RES PRB, K=.01 657
  • Rainbow 4500
    Temp Control
    853-110748-121
    ASSY, REFRGN STNLS, LWR 2080 653
  • Rainbow 4500
    Temp Control
    853-110748-120
    ASSY, REFRGN STNLS, UPR 2080 649
  • Rainbow 4500
    Temp Control
    853-110566-001
    ASSY, IND, FLT SENS, 2080 TCU 637
  • Rainbow 4500
    Temp Control
    853-110199-020
    ASSY, FRAME, 2080 631
  • Rainbow 4500
    Temp Control
    853-025245-203
    ASSY, TEMP PROBE, INSUL, INLN 589
  • Rainbow 4500
    Temp Control
    853-025245-202
    ASSY, TEMP PROBE, INSUL, TANK 587
  • Rainbow 4500
    Temp Control
    853-025244-022
    ASSY, COIL, SOLENOID 585
  • Rainbow 4500
    Temp Control
    853-025242-001
    ASSY, IMMERSION HEATER 583
  • Rainbow 4500
    Temp Control
    853-025238-001
    ASSY, HEATER, CRANKCASE 581
  • Rainbow 4500
    Temp Control
    852-110747-121
    ASSY, CHNL, STNLS, LWR, 2080 645
  • Rainbow 4500
    Temp Control
    852-110747-120
    ASSY, CHNL, STNLS, UPR, 2080 641
  • Rainbow 4500
    Temp Control
    852-110198-020
    ASSY ELECTRONIC BOX 2080 CE97 617
  • Rainbow 4500
    Temp Control
    851-110195-120
    ASSY, TOP 2080 TCU CE97 611
  • Rainbow 4500
    Temp Control
    848-220766-917
    FTR, 4520i, TCU/HW, CE97 665
  • Rainbow 4500
    Temp Control
    843-110782-020
    KIT, INSTL, 2080 CE97 655
  • Rainbow 4500
    Temp Control
    810-025370-004
    ASSY, PCB CHILLER CONTROL 603
  • Rainbow 4500
    Temp Control
    810-025369-003
    ASSY, PCB CHILLER RESISTIVITY 595
  • Rainbow 4500
    Temp Control
    810-025368-001
    ASSY, PCB, RELAY ASSEMBLY 591
  • Rainbow 4500
    Temp Control
    210-110747-001
    SCH, CHNL, STNLS, UPR, 2080 639
CEO. LEE HYEONGSEOKBusiness Number. 312-86-64139(161511-0165055)
Address. 90, Sinhyangchon-gil, Seonghwan-eup, Seobuk-gu, Cheonan-si, Chungcheongnam-do, Republic of Korea
TEL. +82-41-583-7231E-mail. chryu@on-semi.co.kr

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