LAM 8 페이지

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LAM

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  • System
    Module
    Parts No.
    Discription
    Option
    Short Name
  • Rainbow 4500
    Reactor Chamber
    853-017643-011
    ASSY, MNMTR, W/KF10
  • Rainbow 4500
    Reactor Chamber
    853-017631-002
    ASSY VACSW714.5 +-31 TORR
  • Rainbow 4500
    Reactor Chamber
    853-017626-001
    ASSY CHAMBER VACUUM SWITCH
  • Rainbow 4500
    Reactor Chamber
    853-017350-905
    ASSY, GAP DR CONT BOX
  • Rainbow 4500
    Reactor Chamber
    853-011661-001
    ASSY LIFTER CYLINDER
  • Rainbow 4500
    Reactor Chamber
    853-011632-002
    ASSY LOWER ELECTRODE OXIDE
  • Rainbow 4500
    Reactor Chamber
    853-011168-002
    ASSY, GAP DR MOT PTCTR &B/O
  • Rainbow 4500
    Reactor Chamber
    853-011142-001
    ASSY MOTOR RF GAP
  • Rainbow 4500
    Reactor Chamber
    853-011141-003
    ASSY BRAKE RF GAP
  • Rainbow 4500
    Reactor Chamber
    853-011094-103
    ASSY MONOCHROMATOR
  • Rainbow 4500
    Reactor Chamber
    853-011094-102
    ASSY MONOCHROMATOR
  • Rainbow 4500
    Reactor Chamber
    853-011094-101
    ASSY MONOCHROMATOR
  • Rainbow 4500
    Reactor Chamber
    853-011053-103
    ASSY, MNFLD, CHMBR MANOMETER
  • Rainbow 4500
    Reactor Chamber
    853-011053-101
    ASSY, MNFLD, CHMBR MANOMTR, 4520
  • Rainbow 4500
    Reactor Chamber
    852-011061-101
    ASSY, HSG, LWR CHMBR, LO PRESS OX
  • Rainbow 4500
    Reactor Chamber
    848-220765-904
    FEATURE, 4520 HYT SENSORPORTS
  • Rainbow 4500
    Reactor Chamber
    848-210723-911
    FTR, 4520GF, ENDPOINT PLUS
  • Rainbow 4500
    Reactor Chamber
    848-210705-001
    FTR, EXH MANF, 4520GF
  • Rainbow 4500
    Reactor Chamber
    848-210691-001
    FTR, UPR CHMBR CLP CONFIG, 4520G
  • Rainbow 4500
    Reactor Chamber
    848-210690-001
    FTR, WFR CONFIG, 4520GF
  • Rainbow 4500
    Reactor Chamber
    848-210679-001
    FTR, BAF CONFIG, 4520GF
  • Rainbow 4500
    Reactor Chamber
    848-210675-001
    FTR, O-RING, 4520GF
  • Rainbow 4500
    Reactor Chamber
    848-210061-911
    FTR, 4520, MONOCHRMTE GF
  • Rainbow 4500
    Reactor Chamber
    846-000798-001
    KIT, AT/SER ADPTR, PS/2 KYBD/TRK
  • Rainbow 4500
    Reactor Chamber
    810-017098-001
    ASSY, PCB, GAP DRIVE AMPLINTLK
  • Rainbow 4500
    Reactor Chamber
    810-017094-001
    ASSY, PCB, GAP BREAKOUT
  • Rainbow 4500
    Reactor Chamber
    810-017093-001
    ASSY, PCB, GAPMOTOR CONTROLLER
  • Rainbow 4500
    Reactor Chamber
    800-210622-001
    ASSY, RNG, CPLG, LVLG, ESC, 6&8 JDA
  • Rainbow 4500
    Reactor Chamber
    800-210621-001
    ASSY, RNG, CPLG, LVLG, ESC, 6&8SEMI
  • Rainbow 4500
    Reactor Chamber
    800-140483-001
    ASSY, UPR RCTN CHMBR, 4520GF
  • Rainbow 4500
    Reactor Chamber
    800-140482-001
    ASSY, LWR RCTN CHMBR, 4520GF
  • Rainbow 4500
    Reactor Chamber
    800-028525-001
    ASSY DWG, TEMPERATURE SENSOR
  • Rainbow 4500
    Reactor Chamber
    800-017653-001
    ASSY MANOMETER 4520
  • Rainbow 4500
    Reactor Chamber
    800-017643-001
    ASSY MANOMETER
  • Rainbow 4500
    Reactor Chamber
    800-011168-002
    ASSY, DWG, GAP DR MOT PTCTR
  • Rainbow 4500
    Reactor Chamber
    684-000793-001
    CA, TRKBL, PS/2 TO SERIALDB9
  • Rainbow 4500
    Reactor Chamber
    684-000791-001
    CA, KYBD, PS/2 TO AT
  • Rainbow 4500
    Reactor Chamber
    210-017631-001
    SCH, VACUUM SWITCH
  • Rainbow 4500
    Reactor Chamber
    210-017098-001
    SCH, PCB-GAP DRV AMP INTERLOCK
  • Rainbow 4500
    Reactor Chamber
    210-017094-001
    SCH, PCB, GAP BREAKOUT
  • Rainbow 4500
    Reactor Chamber
    210-017093-001
    SCH, PCB, GAP MOT CONT
  • Rainbow 4500
    Reactor Chamber
    210-011168-002
    SCH, GAP DRIVE MOTOR PROTECTOR
  • Rainbow 4500
    Reactor Chamber
    210-011141-003
    SCH, BRAKE, RF GAP
  • Rainbow 4500
    Pressure Control
    860-190602-004
    INSTL, PRESS CONT, 4420/XL 573
  • Rainbow 4500
    Pressure Control
    860-010141-301
    INSTL, VAC/FACIL, 4520, SC 543
  • Rainbow 4500
    Pressure Control
    860-010141-141
    INSTAL, VACUUM FACILITIES 4500S 537
  • Rainbow 4500
    Pressure Control
    860-010141-101
    INSTL, VAC/FACILITIES, L OXD 533
  • Rainbow 4500
    Pressure Control
    860-010135-003
    INSTL, VAC/FACIL, 4420 527
  • Rainbow 4500
    Pressure Control
    860-010135-001
    INSTL, VACUUM/FACILITIES(POLY) 521
  • Rainbow 4500
    Pressure Control
    857-100111-001
    KIT, MANOMETER, CHMBR MNFLD 571
  • Rainbow 4500
    Pressure Control
    853-017643-001
    ASSY MANOMETER 559
  • Rainbow 4500
    Pressure Control
    853-015535-001
    ASSY, FLOW SWITCH, RF GENERATOR 555
  • Rainbow 4500
    Pressure Control
    853-013575-002
    ASSY INTERCONN MANF, HTD 553
  • Rainbow 4500
    Pressure Control
    853-013542-002
    ASSY ISOLATION VALVE, HTD 551
  • Rainbow 4500
    Pressure Control
    853-013541-002
    ASSY THROTTLE VALVE, HTD 549
  • Rainbow 4500
    Pressure Control
    210-015535-001
    SCH, FLOW SWITCH, RF GEN 557
  • Rainbow 4500
    Loadlocks
    860-110920-001
    INSTL, EXIT LL, GF, LVD 321
  • Rainbow 4500
    Loadlocks
    860-010112-001
    INSTALLATION ENT LOADLOCK 257
  • Rainbow 4500
    Loadlocks
    854-012170-002
    ASSY, SFT, ARM DR 271
  • Rainbow 4500
    Loadlocks
    853-320030-008
    ASSY, OPT SNSR, DARL W/LEADS 347
  • Rainbow 4500
    Loadlocks
    853-320030-005
    ASSY, OPT SNSR, DARL W/LEADS 343
  • Rainbow 4500
    Loadlocks
    853-320030-003
    ASSY, OPT SNSR, DARL W/LEADS 341
  • Rainbow 4500
    Loadlocks
    853-190259-002
    ASSY, STPR MTR, ARM DRV ROT 337
  • Rainbow 4500
    Loadlocks
    853-190259-001
    ASSY, STPR MTR, ARM DRV EXT 333
  • Rainbow 4500
    Loadlocks
    853-140013-001
    ASSEMBLY, GATE, OUTER 325
  • Rainbow 4500
    Loadlocks
    853-110919-001
    ASSY, EXIT LL, GF, LVD 317
  • Rainbow 4500
    Loadlocks
    853-029462-001
    ASSY, WAFER SENSOR, EXIT 311
  • Rainbow 4500
    Loadlocks
    853-029461-001
    ASSY, PHOTOSENSOR INSTL 307
  • Rainbow 4500
    Loadlocks
    853-017634-101
    ASSY SOLENOID RELEASE 303
  • Rainbow 4500
    Loadlocks
    853-017633-004
    ASSY, OPT SNSR, DRLGTN, 5.50 299
  • Rainbow 4500
    Loadlocks
    853-017633-003
    ASSY, OPT SNSR, DRLGTN, 4.75 297
  • Rainbow 4500
    Loadlocks
    853-012875-001
    ASSY GATE DRIVE INNER 291
  • Rainbow 4500
    Loadlocks
    853-012232-001
    ASSY AIR CYLINDER INSEPERABLE 289
  • Rainbow 4500
    Loadlocks
    853-012230-002
    ASSY, GATE, INR 287
  • Rainbow 4500
    Loadlocks
    853-012200-002
    ASSY GATE DRIVE INNER 281
  • Rainbow 4500
    Loadlocks
    853-012176-008
    ASSY WAFER HOLDER TIGHT POCKE 279
  • Rainbow 4500
    Loadlocks
    853-012176-006
    ASSY WAFER HOLDER TIGHT POCKE 277
  • Rainbow 4500
    Loadlocks
    853-012176-005
    ASSY WAFER HOLDER TIGHT POCKE 275
  • Rainbow 4500
    Loadlocks
    853-012176-004
    ASSY WAFER HOLDER TIGHT POCKE 273
  • Rainbow 4500
    Loadlocks
    853-012160-003
    ASSY, SPINDLE 269
  • Rainbow 4500
    Loadlocks
    853-012123-004
    ASSY, ARM DR, HARM, 8 PIN CONN 263
  • Rainbow 4500
    Loadlocks
    853-012100-004
    ASSY, ARM HOUSING, ONE PIECE 261
  • Rainbow 4500
    Loadlocks
    852-140381-003
    ASSY, LL, ENTR HD ANDZ 329
  • Rainbow 4500
    Loadlocks
    210-320030-XXX
    SCH, OPT SNSR, DARL W/LEADS 349
  • Rainbow 4500
    Loadlocks
    210-190259-001
    SCH, STPR MTR 335
  • Rainbow 4500
    Loadlocks
    210-029462-001
    SCH, WFR SNSR, EXIT LL 315
  • Rainbow 4500
    Loadlocks
    210-029461-001
    SCH, PHOTOSENSOR INSTL 309
  • Rainbow 4500
    Loadlocks
    210-017634-101
    SCH, SOLENOID, RELEASE 305
  • Rainbow 4500
    Gas Delivery
    860-020180-105
    INSTL, ORBITAL GAS PANEL, 4520 309
  • Rainbow 4500
    Gas Delivery
    859-260180-100
    KIT, HARN ASSY, STND, ORB GAS PNL 435
  • Rainbow 4500
    Gas Delivery
    859-190206-102
    KIT, CA ASSY, ORB GAS PNL, 8-GAS 431
  • Rainbow 4500
    Gas Delivery
    859-190206-101
    KIT, CA ASSY, ORB GAS PNL, 6-GAS 429
  • Rainbow 4500
    Gas Delivery
    859-170193-100
    KIT, JIT, GAS PNL EXT BOXBOT SC 425
  • Rainbow 4500
    Gas Delivery
    859-170190-003
    KIT, JIT, VLV ADDED WLDMTS, POLY 423
  • Rainbow 4500
    Gas Delivery
    859-170190-001
    KIT, JIT, VLV ADDED WLDMTS, ORB 421
  • Rainbow 4500
    Gas Delivery
    859-170159-100
    KIT, JIT, BTN UP, O/W GAS PNL, S/V 363
  • Rainbow 4500
    Gas Delivery
    859-024404-005
    KIT, JIT, ORB GAS PNL WLDMT, POLY 333
  • Rainbow 4500
    Gas Delivery
    853-441814-001
    ASSY, HTD FLTR, NCKL, NF-30 451
  • Rainbow 4500
    Gas Delivery
    853-441813-001
    ASSY, HTD FLTR, MOTT, HASTEL, 01UM 449
  • Rainbow 4500
    Gas Delivery
    853-170184-100
    ASSY, WLDMT, HE 419
CEO. LEE HYEONGSEOKBusiness Number. 312-86-64139(161511-0165055)
Address. 90, Sinhyangchon-gil, Seonghwan-eup, Seobuk-gu, Cheonan-si, Chungcheongnam-do, Republic of Korea
TEL. +82-41-583-7231E-mail. chryu@on-semi.co.kr

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