-
System
Module
Parts No.
Discription
Option
Short Name
-
Axcelis
Quartz Kit
281401
Tube, Quartz
-
Axcelis
Quartz Kit
284341
Quartz Disc, Synthetic, 1.00" Dia x 1/8” Thk
-
Axcelis
Quartz Kit
280861
Pin, Process Chamber Quartz
-
Axcelis
Quartz Kit
316631
Orifice, Plasma Quartz Disc Modified
-
Axcelis
Quartz Kit
280241
Heater Window, Process Chamber
-
Axcelis
Quartz Kit
285592
Baffle Plate Assembly, 8" Wafer
-
Axcelis
Quartz Kit
281401
Tube, Quartz
-
Axcelis
Quartz Kit
284341
Quartz Disc, Synthetic, 1.00" Dia x 1/8” Thk
-
Axcelis
Quartz Kit
280861
Pin, Process Chamber Quartz
-
Axcelis
Quartz Kit
316631
Orifice, Plasma Quartz Disc Modified
-
Axcelis
Quartz Kit
280241
Heater Window, Process Chamber
-
Axcelis
Quartz Kit
285591
Baffle Plate Assembly, 6" Wafer
-
Axcelis
Spare Kit - III (6")
280521
Transducer, Baratron Vacuum, P/N 626A-11T-A-E
-
Axcelis
Spare Kit - III (6")
313806
TC Assembly, 6 In & 8 In Systems
-
Axcelis
Spare Kit - III (6")
303363
PWB Assembly, Wafer Detection Tower, 8 In/25 Wafer
-
Axcelis
Spare Kit - III (6")
344281
PWB Assembly, System Interface Card, Version II w/ISO SECS-II
-
Axcelis
Spare Kit - III (6")
319701
PWB Assembly, STD I/O Terminator Plug
-
Axcelis
Spare Kit - III (6")
322391
PWB Assembly, Signal Tower Control Card
-
Axcelis
Spare Kit - III (6")
343281
PWB Assembly, Left/Right Dual Serial Interface Board
-
Axcelis
Spare Kit - III (6")
315811
PWB Assembly, Lamp Control Board
-
Axcelis
Spare Kit - III (6")
64481
PWB Assemble, Interrupter Chuck
-
Axcelis
Spare Kit - III (6")
342411
PWB Assemble, Front/Rear Touchscreen
-
Axcelis
Spare Kit - III (6")
386642
PWB Assembly, Dual HV-SMPS Controller Interface
-
Axcelis
Spare Kit - III (6")
322151
PWB Assembly, Dual Chamber PDB Control Board
-
Axcelis
Spare Kit - III (6")
321531
PWB Assembly, Dual Chamber DC Power Distribution Board
-
Axcelis
Spare Kit - III (6")
249181
PWB Assembly, Dual Cassette Handler Card
-
Axcelis
Spare Kit - III (6")
249141
PWB Assembly, Dual Cassette Handler Board
-
Axcelis
Spare Kit - III (6")
98841
PWB Assembly, Cold Plate Interconnect
-
Axcelis
Spare Kit - III (6")
248411
PWB Assembly, 8086 CPU Card
-
Axcelis
Spare Kit - III (6")
344531
PWB Assembly, 6 MFC Gasbox Interface Board
-
Axcelis
Spare Kit - III (6")
437581
PWB Assembly, 3-Axis Wafer Handler STD Card
-
Axcelis
Spare Kit - III (6")
249251
PWB Assembly, 3-Axis Wafer Handler STD Card
-
Axcelis
Spare Kit - III (6")
429291
PWB Assembly, 3, Axis Robot Base Board
-
Axcelis
Spare Kit - III (6")
249331
PWB Assembly, 2-Head Wafer Transport Pan Interface Board
-
Axcelis
Spare Kit - III (6")
314553
Controller, Watlow, 1/8 DIN
-
Axcelis
Spare Kit - III (6")
423621
Cable, Detection Tower Wafer
-
Axcelis
Spare Kit - III (6")
280521
Transducer, Baratron Vacuum, P/N 626A-11T-A-E
-
Axcelis
Spare Kit - III (6")
313806
TC Assembly, 6 In & 8 In Systems
-
Axcelis
Spare Kit - III (6")
302763
PWB Assembly, Wafer Detection Tower, 6 In/25 Wafer
-
Axcelis
Spare Kit - III (6")
344281
PWB Assembly, System Interface Card, Version II w/ISO SECS-II
-
Axcelis
Spare Kit - III (6")
319701
PWB Assembly, STD I/O Terminator Plug
-
Axcelis
Spare Kit - III (6")
322391
PWB Assembly, Signal Tower Control Card
-
Axcelis
Spare Kit - III (6")
343281
PWB Assembly, Left/Right Dual Serial Interface Board
-
Axcelis
Spare Kit - III (6")
315811
PWB Assembly, Lamp Control Board
-
Axcelis
Spare Kit - III (6")
64481
PWB Assemble, Interrupter Chuck
-
Axcelis
Spare Kit - III (6")
342411
PWB Assemble, Front/Rear Touchscreen
-
Axcelis
Spare Kit - III (6")
386642
PWB Assembly, Dual HV-SMPS Controller Interface
-
Axcelis
Spare Kit - III (6")
322151
PWB Assembly, Dual Chamber PDB Control Board
-
Axcelis
Spare Kit - III (6")
321531
PWB Assembly, Dual Chamber DC Power Distribution Board
-
Axcelis
Spare Kit - III (6")
249181
PWB Assembly, Dual Cassette Handler Card
-
Axcelis
Spare Kit - III (6")
249141
PWB Assembly, Dual Cassette Handler Board
-
Axcelis
Spare Kit - III (6")
98841
PWB Assembly, Cold Plate Interconnect
-
Axcelis
Spare Kit - III (6")
248411
PWB Assembly, 8086 CPU Card
-
Axcelis
Spare Kit - III (6")
344531
PWB Assembly, 6 MFC Gasbox Interface Board
-
Axcelis
Spare Kit - III (6")
437581
PWB Assembly, 3-Axis Wafer Handler STD Card
-
Axcelis
Spare Kit - III (6")
249251
PWB Assembly, 3-Axis Wafer Handler STD Card
-
Axcelis
Spare Kit - III (6")
429291
PWB Assembly, 3, Axis Robot Base Board
-
Axcelis
Spare Kit - III (6")
249331
PWB Assembly, 2-Head Wafer Transport Pan Interface Board
-
Axcelis
Spare Kit - III (6")
314553
Controller, Watlow, 1/8 DIN
-
Axcelis
Spare Kit - III (6")
423621
Cable, Detection Tower Wafer
-
Axcelis
Spare Kit - II
280521
Transducer, Baratron Vacuum, P/N 626A-11T-A-E
-
Axcelis
Spare Kit - II
313807
TC Assembly, 5 In Systems
-
Axcelis
Spare Kit - II
302763
PWB Assembly, Wafer Detection Tower, 6 In/25 Wafer
-
Axcelis
Spare Kit - II
344281
PWB Assembly, System Interface Card, Version II w/ISO SECS-II
-
Axcelis
Spare Kit - II
319701
PWB Assembly, STD I/O Terminator Plug
-
Axcelis
Spare Kit - II
322391
PWB Assembly, Signal Tower Control Card
-
Axcelis
Spare Kit - II
343281
PWB Assembly, Left/Right Dual Serial Interface Board
-
Axcelis
Spare Kit - II
315811
PWB Assembly, Lamp Control Board
-
Axcelis
Spare Kit - II
64481
PWB Assemble, Interrupter Chuck
-
Axcelis
Spare Kit - II
342411
PWB Assemble, Front/Rear Touchscreen
-
Axcelis
Spare Kit - II
386642
PWB Assembly, Dual HV-SMPS Controller Interface
-
Axcelis
Spare Kit - II
322151
PWB Assembly, Dual Chamber PDB Control Board
-
Axcelis
Spare Kit - II
321531
PWB Assembly, Dual Chamber DC Power Distribution Board
-
Axcelis
Spare Kit - II
249181
PWB Assembly, Dual Cassette Handler Card
-
Axcelis
Spare Kit - II
249141
PWB Assembly, Dual Cassette Handler Board
-
Axcelis
Spare Kit - II
98841
PWB Assembly, Cold Plate Interconnect
-
Axcelis
Spare Kit - II
248411
PWB Assembly, 8086 CPU Card
-
Axcelis
Spare Kit - II
344531
PWB Assembly, 6 MFC Gasbox Interface Board
-
Axcelis
Spare Kit - II
437581
PWB Assembly, 3-Axis Wafer Handler STD Card
-
Axcelis
Spare Kit - II
249251
PWB Assembly, 3-Axis Wafer Handler STD Card
-
Axcelis
Spare Kit - II
429291
PWB Assembly, 3, Axis Robot Base Board
-
Axcelis
Spare Kit - II
249331
PWB Assembly, 2-Head Wafer Transport Pan Interface Board
-
Axcelis
Spare Kit - II
314553
Controller, Watlow, 1/8 DIN
-
Axcelis
Spare Kit - II
423621
Cable, Detection Tower Wafer
-
Axcelis
Spare Kit - II
208556
Valve, Diverter 3-Way Solenoid, 125 psi, 24 Vdc, 10W (Chamber Cooling)
-
Axcelis
Spare Kit - II
44787
Valve, 2 Way NC Solenoid, 100 psi, 24 Vdc (Gas Sys- tem)
-
Axcelis
Spare Kit - II
284361
Valve, 2 Port VCR NC Bellows, SS (Gas System)
-
Axcelis
Spare Kit - II
248842
Tubing, 3-Axis Coiled
-
Axcelis
Spare Kit - II
26331
Switch, SPDT Limit, 250V, 11A, Basic (Lid, Chamber)
-
Axcelis
Spare Kit - II
287051
Switch, Pressure, 40 psi
-
Axcelis
Spare Kit - II
258451
Switch, Cassette Handler Limit, Modification
-
Axcelis
Spare Kit - II
434445
Stepper Motor Assembly, 3-Axis Robot Vertical Drive
-
Axcelis
Spare Kit - II
434444
Stepper Motor Assembly, 3-Axis Robot Rotary Drive
-
Axcelis
Spare Kit - II
403791
PWB Assembly, Lid Temperature Control Board
-
Axcelis
Spare Kit - II
549501
Cable Assembly, Right Emitter
-
Axcelis
Spare Kit - II
549502
Cable Assembly, Left Emitter
-
Axcelis
Spare Kit - II
251361
Housing, Aperture Emitter
-
Axcelis
Spare Kit - II
251371
Aperture, 3 Axis Robot
-
Axcelis
Spare Kit - II
251351
Tube, Aperture Light
-
Axcelis
Spare Kit - II
398431
Kit, Right Emitter Assembly
