-
System
Module
Parts No.
Discription
Option
Short Name
-
Axcelis
SMIF Assembly
430632
SMIF System Interconnect Cable Assembly
-
Axcelis
SMIF Assembly
430631
SMIF System Interconnect Cable Assembly
-
Axcelis
SMIF Assembly
412631
SMIF Interface Card PWB Assembly
-
Axcelis
SMIF Assembly
430611
SMIF DC Supply Cable Assembly
-
Axcelis
SMIF Assembly
441861
Remote EMO Integrated SMIF Cable Assembly
-
Axcelis
SMIF Assembly
453001
Power Supply
-
Axcelis
SMIF Assembly
414502
SMIF Loader Control Board PWB Assembly
-
Axcelis
SMIF Assembly
414501
SMIF Loader Control Board PWB Assembly
-
Axcelis
SMIF Assembly
443701
DC Supply M200 Integrated SMIF Cable Assembly
-
Axcelis
SMIF Assembly
430561
Cassette Handler Cable Assembly
-
Axcelis
SMIF Assembly
453371
Front Display Power Harness Assembly
-
Axcelis
SMIF Assembly
441841
115 Vac to 24 Vdc P.S. Integrated SMIF Cable Assembly
-
Axcelis
SMIF Assembly
441851
+5VDC EMO Box Integrated SMIF Cable Assembly
-
Axcelis
Process Chamber
401449
O-Ring, Viton, 2-013, 0.426 ID x 0.070 Wide
-
Axcelis
Process Chamber
314688
O-Ring, Chemraz, 2-010, 0.239 ID x 0.070 Wide
-
Axcelis
Process Chamber
314721
Fitting, Ultra-Torr, Modified
-
Axcelis
Process Chamber
280521
Transducer, Baratron Vacuum, P/N1626A-11T-A-E
-
Axcelis
Process Chamber
313806
Thermocouple Assembly, 6”/8”
-
Axcelis
Process Chamber
313801
Thermocouple Assembly, 6”/8” (Obsolete)
-
Axcelis
Process Chamber
313807
Thermocouple Assembly, 5”
-
Axcelis
Process Chamber
313802
Thermocouple Assembly, 5” (Obsolete)
-
Axcelis
Process Chamber
26331
Switch, SPDT Limit, 250V, 11A, Basic, 150C
-
Axcelis
Process Chamber
284443
Gasket Retainer Assembly
-
Axcelis
Process Chamber
282482
Switch, Mini Vacuum, 1.6 In. Hg
-
Axcelis
Process Chamber
399821
Spring, Plunger
-
Axcelis
Process Chamber
202307
Spring, Compression, .180 OD x .750 long
-
Axcelis
Process Chamber
282052
Screen, Foreline, 20 x 20 Mesh
-
Axcelis
Process Chamber
202306
Spring, Compression, .180 OD x .250 long
-
Axcelis
Process Chamber
281681
Roller, Process Chamber Door
-
Axcelis
Process Chamber
280391
Retainer, Process Chamber Window
-
Axcelis
Process Chamber
289301
Retainer, Lens
-
Axcelis
Process Chamber
284341
Quartz Disc, Synthetic, 1.00 Dia x 1/8 Thk
-
Axcelis
Process Chamber
209611
O-Ring, Viton, 2-220, 1.359 ID x 0.139 Wide
-
Axcelis
Process Chamber
314686
O-Ring, Chemraz, 2-210, 0.734 ID x 0.139 Wide
-
Axcelis
Process Chamber
438771
O-Ring, Chemraz, 2-117, 0.799 ID x 0.103 Wide
-
Axcelis
Process Chamber
342652
Retainer, Chamber Window (Obsolete)
-
Axcelis
Process Chamber
284341
Quartz Disc, Synthetic, 1.00 Dia x 1/8 Thk
-
Axcelis
Process Chamber
209611
O-Ring, Viton, 2-220, 1.359 ID x .139 Wide
-
Axcelis
Process Chamber
314686
O-Ring, Chemraz, 2-210, 0.734 ID x 0.139 Wide
-
Axcelis
Process Chamber
342651
Retainer, Chamber Window (Obsolete)
-
Axcelis
Process Chamber
403791
PWB Assembly, Lid Temperature Control Board
-
Axcelis
Process Chamber
285781
PWB Assembly, Lid Temperature Control Board (Obsolete)
-
Axcelis
Process Chamber
398331
Pin, Spring, .078 Dia x .437 long
-
Axcelis
Process Chamber
280861
Pin, Process Chamber Quartz
-
Axcelis
Process Chamber
321571
Pin, Lid Replacement Locating
-
Axcelis
Process Chamber
313761
Tool, TC Alignment
-
Axcelis
Process Chamber
396225
O-Ring, Silicone, 2-364, 6.725 ID x .210 Wide
-
Axcelis
Process Chamber
284914
O-Ring, Viton, 2-313, 0.662 ID x 0.210 Wide
-
Axcelis
Process Chamber
258853
O-Ring, Viton, 2-173, 8.487 ID x .103 Thk
-
Axcelis
Process Chamber
396223
O-Ring, Silicone, 2-371, 8.475 ID x 0.210 Wide
-
Axcelis
Process Chamber
314684
O-Ring, Chemraz, 2-268, 8.484 ID x 0.139 Wide
-
Axcelis
Process Chamber
314682
O-Ring, Chemraz, 2-224, 1.734 ID x 0.139 Wide
-
Axcelis
Process Chamber
315291
O-Ring, Chemraz, 2-120, 0.987 ID x 0.103 Wide
-
Axcelis
Process Chamber
286561
Lens, Synthetic. Quartz, 25.4 mm Dia. x 38 mm Focal Length
-
Axcelis
Process Chamber
398341
Lamp Holder Assembly Right Side
-
Axcelis
Process Chamber
398342
Lamp Holder Assembly Left Side
-
Axcelis
Process Chamber
286177
Lamp, Long Life, 120 Vac, 1000 Watt
-
Axcelis
Process Chamber
280241
Heater Window, Process Chamber
-
Axcelis
Process Chamber
287231
Harness Assembly, Chamber
-
Axcelis
Process Chamber
308511
Grease, Formblin, RT-15
-
Axcelis
Process Chamber
314721
Fitting, Thermocouple Ultra-Torr, Modified
-
Axcelis
Process Chamber
530911
Plate, End Point Retaining
-
Axcelis
Process Chamber
209611
O-Ring, Viton, 2-220, 1.359 ID x 0.139 Wide
-
Axcelis
Process Chamber
284917
O-Ring, Viton, 2-117, 0.799 ID x 0.103 Wide
-
Axcelis
Process Chamber
314686
O-Ring, Chemraz, 2-210, 0.734 ID x 0.139 Wide
-
Axcelis
Process Chamber
286561
Lens, Synthetic
-
Axcelis
Process Chamber
284341
Disc, Synthetic Quartz
-
Axcelis
Process Chamber
530831
End Point Window, Recessed
-
Axcelis
Process Chamber
390291
Cylinder, Pancake
-
Axcelis
Process Chamber
283271
Bearing, Linear, 160mm long, P/N SR15W-1SSM- 160LM
-
Axcelis
Process Chamber
285592
Baffle Plate Assembly, 8" Wafer
-
Axcelis
Process Chamber
285591
Baffle Plate Assembly, 6" Wafer
-
Axcelis
Power Distribution
441492
Transformer, Multi-Purpose, 100 - 230V
-
Axcelis
Power Distribution
424781
Switch, Security
-
Axcelis
Power Distribution
320062
Switch, Rotary w/Door Clutch, w/Neutral
-
Axcelis
Power Distribution
89901
Sonalert, Audible Alarm, 2900 Hz, Panel Mount, 6-28V AC/DC
-
Axcelis
Power Distribution
441591
Relay, SPDT, 24 Vac/dc, 10A, 380 Vac
-
Axcelis
Power Distribution
424381
PWB Assembly, PDB Control Board
-
Axcelis
Power Distribution
386551
Power Supply, Single Output, +12V
-
Axcelis
Power Distribution
443521
Power Supply, 85-264 Vac,+5V, ±15V, +24 Vdc
-
Axcelis
Power Distribution
325792
Ground Strap, 7:, 5 AWG
-
Axcelis
Power Distribution
243339
Fuse, 10A, 250V, Time Delay, MDA-10
-
Axcelis
Power Distribution
447421
Fuse Block, 600V, 25A, .25 x 1.25
-
Axcelis
Power Distribution
441501
Contactor, 400V, 4P, 45A
-
Axcelis
Power Distribution
438002
Contact Block, Auxiliary, 2 N.O. Contacts, 2nd set
-
Axcelis
Power Distribution
438001
Contact Block, Auxiliary, 2 N.O. Contacts, 1st set
-
Axcelis
Power Distribution
436643
Contactor, 400V, 4P, 140A
-
Axcelis
Power Distribution
441534
Circuit Breaker, Thermal Magnetic, 240V, 3 Pole, 32 Amp
-
Axcelis
Power Distribution
441533
Circuit Breaker, Thermal Magnetic, 480 Vac, 3 Pole, 50 Amp
-
Axcelis
Power Distribution
441541
Circuit Breaker, Thermal Magnetic, 480V, 4 Pole, 16 Amp
-
Axcelis
Power Distribution
441543
Circuit Breaker, Thermal Magnetic, 480V, 4 Pole, 32 Amp
-
Axcelis
Power Distribution
441526
Circuit Breaker, Thermal Magnetic, 240V, 2 Pole, 1 Amp
-
Axcelis
Power Distribution
441532
Circuit Breaker, Thermal Magnetic, 240V, 3 Pole, 25 Amp
-
Axcelis
Power Distribution
441525
Circuit Breaker, Thermal Magnetic, 240V, 2 Pole, 16 Amp
-
Axcelis
Power Distribution
441523
Circuit Breaker, Thermal Magnetic, 240V, 2 Pole, 6 Amp
-
Axcelis
Power Distribution
441511
Circuit Breaker, Thermal Magnetic, 240V, 1 Pole, 6 Amp
-
Axcelis
Power Distribution
446471
Circuit Breaker, Thermal Magnetic, 277V, 1 Pole, 1 Amp
-
Axcelis
Power Distribution
443061
Circuit Breaker, Thermal Magnetic, 480V, 2 Pole, 2 Amp, D Curve
-
Axcelis
Power Distribution
441521
Circuit Breaker, Thermal Magnetic, 240V, 2 Pole, 2 Amp
-
Axcelis
Power Distribution
320521
Circuit Breaker, Earth Leakage Detector, 100/200/415V, 3 Pole, 125 Amp