-
System
Module
Parts No.
Discription
Option
Short Name
-
Axcelis
Power Distribution
436632
Circuit Breaker, Magnetic, 415 Vac, 4 Pole, 125 Amp
-
Axcelis
Power Distribution
436631
Circuit Breaker, Magnetic, 415 Vac, 4 Pole, 80 Amp
-
Axcelis
Plasma Generator
319962
Transformer, Circular Control, 300 kVA
-
Axcelis
Plasma Generator
319963
Transformer, Circular Control, 200 kVA
-
Axcelis
Plasma Generator
319961
Transformer, Circular Control, 200 kVA
-
Axcelis
Plasma Generator
320062
Switch, Rotary w/Door Clutch, No Neutral
-
Axcelis
Plasma Generator
320061
Switch, Rotary w/Door Clutch, No Neutral
-
Axcelis
Plasma Generator
64234
Switch Assembly, Interlock, Door, 2.5 lb Force
-
Axcelis
Plasma Generator
64231
Switch Assembly, Interlock, Door, 2.5 lb Force
-
Axcelis
Plasma Generator
89901
Sonalert, Audible Alarm, 2900 Hz, Panel Mount, 6-28V AC/DC
-
Axcelis
Plasma Generator
322151
PWB Assembly, Dual Chamber PDB Control Board
-
Axcelis
Plasma Generator
317463
Power Supply, +5, +12, +/-15, Custom
-
Axcelis
Plasma Generator
559461
Power Supply, 250 W, 24 Vdc
-
Axcelis
Plasma Generator
210022
Power Supply, 170/264 Vac, 24 Vdc Single
-
Axcelis
Plasma Generator
418721
Contactor, Power, 3-Phase, 30A, 24V/50 Hz
-
Axcelis
Plasma Generator
63041
Contactor, Power, 3PDT, W/4 NO AUX, 24V/60 Hz
-
Axcelis
Plasma Generator
319811
Contactor, 400V, 170A, 50/60 Hz
-
Axcelis
Plasma Generator
319801
Contactor, 400V, 75A, 50/60 Hz
-
Axcelis
Plasma Generator
329661
Circuit Breaker, Thermal Magnetic, DIN Mounting, 480 Vac, 3 Pole, 16 Amp
-
Axcelis
Plasma Generator
329637
Circuit Breaker, Thermal Magnetic, DIN Mounting, 240 Vac, 2 Pole, 6 Amp
-
Axcelis
Plasma Generator
329665
Circuit Breaker, Thermal Magnetic, 480 Vac, 3 Pole, 40 Amp
-
Axcelis
Plasma Generator
329663
Circuit Breaker, Thermal Magnetic, 480 Vac, 3 Pole, 25 Amp
-
Axcelis
Plasma Generator
329617
Circuit Breaker, Thermal Magnetic, 277 Vac, 1 Pole, 6 Amp
-
Axcelis
Plasma Generator
329642
Circuit Breaker, Thermal Magnetic, 240V, 2 Pole, 16 Amp
-
Axcelis
Plasma Generator
329622
Circuit Breaker, Magnetic, 277 Vac, 1 Pole, 20 Amp
-
Axcelis
Plasma Generator
329621
Circuit Breaker, Magnetic, 277 Vac, 1 Pole, 16 Amp
-
Axcelis
Plasma Generator
329619
Circuit Breaker, Magnetic, 277 Vac, 1 Pole, 10 Amp
-
Axcelis
Plasma Generator
329643
Circuit Breaker, Magnetic, 240 V, 2 Pole, 20 Amp
-
Axcelis
Plasma Generator
329699
Circuit Breaker, Magnetic, 240 Vac, 2 Pole, 10 Amp
-
Axcelis
Plasma Generator
320521
Circuit Breaker, Earth Leakage Detector, 3 Pole, 125 Amp, 100/200/415V
-
Axcelis
Plasma Generator
329679
Circuit Breaker, 277V, 1 Pole, 10 Amp, D Curve
-
Axcelis
Plasma Generator
320142
Circuit Breaker, 125 Amp, 480 Vac
-
Axcelis
Plasma Generator
320141
Circuit Breaker, 80 Amp, 480 Vac
-
Axcelis
Plasma Generator
385852
Cable Assembly, Pigtal #17, PDP
-
Axcelis
Plasma Generator
385851
Cable Assembly, Pigtail #17, PDP
-
Axcelis
Plasma Generator
385881
Cable Assembly, Pigtail #14, PDP
-
Axcelis
Plasma Generator
400591
Cable Assembly, Ground Strap
-
Axcelis
Plasma Generator
284452
Tubing, Flexible, DFR, SS, ¼T
-
Axcelis
Plasma Generator
281401
Tube, Quartz
-
Axcelis
Plasma Generator
342481
Process Chamber, Right
-
Axcelis
Plasma Generator
342482
Process Chamber, Left
-
Axcelis
Plasma Generator
316631
Orifice, Plasma Quartz Disc Modified
-
Axcelis
Plasma Generator
321641
Microwave Assembly, Right
-
Axcelis
Plasma Generator
321642
Microwave Assembly, Left
-
Axcelis
Plasma Generator
284442
Gasket Retainer Assembly
-
Axcelis
Microwave
281411
Waveguide
-
Axcelis
Microwave
208556
Valve, Diverter 3-Way Solenoid, 24 Vdc, 10W, 125 psi
-
Axcelis
Microwave
44787
Valve, 2-Way NC Solenoid, 100 psi, 24 Vdc, 1/8 NPT, 1/8 Orifice
-
Axcelis
Microwave
409263
Tubing, Natural Nylon, 0.170 ID x 0.250 OD
-
Axcelis
Microwave
33116
Tube, Silicone, 0.125 ID x 0.250 OD
-
Axcelis
Microwave
385581
Trap, Outer
-
Axcelis
Microwave
283721
Trap, Inner
-
Axcelis
Microwave
5011
Transformer, Filament, 50/60 Hz, 118 Vac to 4.6 Vrms
-
Axcelis
Microwave
395152
Terminal Block Assembly
-
Axcelis
Microwave
26367
Switch, SPST NC Thermal, 185°F, 145°F Close, 240V, 10A
-
Axcelis
Microwave
396512
Switch, Microwave Flow e- Left Side
-
Axcelis
Microwave
396511
Switch, Microwave Flow - Right Side
-
Axcelis
Microwave
218763
Switch, Exhaust Air Pressure, Modified, .50" H2O Set Pres- sure
-
Axcelis
Microwave
64234
Switch Assembly, Door Interlock, 2.5 lb Force
-
Axcelis
Microwave
64231
Switch Assembly, Door Interlock, 2.5 lb Force
-
Axcelis
Microwave
75345
RF Detector Assembly, RF1 & RF2
-
Axcelis
Microwave
438632
Photocell Assembly
-
Axcelis
Microwave
319371
Magnetron Assembly, Hitachi H3862-03
-
Axcelis
Microwave
31562
Lamp, Germicidal, 10.5V, 0.35A, 3W
-
Axcelis
Microwave
95401
Hose, Exhaust, 2" ID X 18.00" Long
-
Axcelis
Microwave
395381
Harness, Plasma Generator AC Control - Right Side
-
Axcelis
Microwave
395382
Harness, Plasma Generator AC Control - Left Side
-
Axcelis
Microwave
395371
Harness Assembly, Plasma HV - Right Side
-
Axcelis
Microwave
395372
Harness Assembly, Plasma HV - Left Side
-
Axcelis
Microwave
395391
Harness Assembly, Plasma Control - Right Side
-
Axcelis
Microwave
395392
Harness Assembly, Plasma Control - Left Side
-
Axcelis
Microwave
274011
Gasket, RF, 0.063" X 0.125"
-
Axcelis
Microwave
30275
Gasket, Knitted Mesh Rectangular RF, 1/8” X 1/16”
-
Axcelis
Microwave
266022
Cover, HV Terminal Lid, 1.50 Dia.
-
Axcelis
Microwave
76493
Coil, Transient Suppression Choke, 1 mH, 1 ohm
-
Axcelis
Microwave
285981
Cable Assembly, Plasma Generator Ignitor Ballast - Right Side
-
Axcelis
Microwave
285982
Cable Assembly, Plasma Generator Ignitor Ballast - Left Side
-
Axcelis
Microwave
284431
Bearing, Teflon Flanged, P/N B9-17
-
Axcelis
Lamp Module
64234
Switch Assembly-Interlock
-
Axcelis
Lamp Module
64231
Switch Assembly-Interlock, Door, 2.5 lb Force
-
Axcelis
Lamp Module
418411
Relay, Solid State, 50A, 4PST, 24 Vdc Coil
-
Axcelis
Lamp Module
284411
Relay, Solid State, 50A, 4PST, 24 Vdc Coil
-
Axcelis
Lamp Module
315811
PWB Assembly, Lamp Control
-
Axcelis
Lamp Module
490821
PWB Assembly, Lamp Control
-
Axcelis
Lamp Module
393792
Harness Assembly, PWR Lamp, U.S. Version
-
Axcelis
Lamp Module
393791
Harness Assembly, PWR Lamp, U.S. Version
-
Axcelis
Lamp Module
393794
Harness Assembly, PWR Lamp, European Version
-
Axcelis
Lamp Module
393793
Harness Assembly, PWR Lamp, European Version
-
Axcelis
Lamp Module
393771
Harness Assembly, PWB Interface
-
Axcelis
Lamp Module
393784
Harness Assembly, Lamp Power, U.S. Version
-
Axcelis
Lamp Module
393783
Harness Assembly, Lamp Power, U.S. Version
-
Axcelis
Lamp Module
393782
Harness Assembly, Lamp Power, U.S. Version
-
Axcelis
Lamp Module
393781
Harness Assembly, Lamp Power, U.S. Version
-
Axcelis
Lamp Module
393788
Harness Assembly, Lamp Power, European Version
-
Axcelis
Lamp Module
393787
Harness Assembly, Lamp Power, European Version
-
Axcelis
Lamp Module
393786
Harness Assembly, Lamp Power, European Version
-
Axcelis
Lamp Module
393785
Harness Assembly, Lamp Power, European Version
-
Axcelis
Lamp Module
402012
Harness Assembly, Lamp Box Control, U.S. Version
-
Axcelis
Lamp Module
402011
Harness Assembly, Lamp Box Control, U.S. Version
-
Axcelis
Lamp Module
402013
Harness Assembly, Lamp Box Control, European Version
