-
System
Module
Parts No.
Discription
Option
Short Name
-
Axcelis
Lamp Module
402014
Harness Assembly, Lamp Box Contro1, European Version
-
Axcelis
Lamp Module
399052
Harness Assembly, Lamp Box
-
Axcelis
Lamp Module
399051
Harness Assembly, Lamp Box
-
Axcelis
Lamp Module
284411
Contactor, Power, 4PST, 600V, 30A, Coil-24 Vdc
-
Axcelis
Lamp Module
61446
Circuit Breaker-Magnetic, 250 Vac, 10A, Double Pole, IEC
-
Axcelis
HV Module
40263
Transformer, Stepdown, 350 VA, 50/60 HZ, 208/480 Pri, 117/129V Sec
-
Axcelis
HV Module
386642
PWB Assembly-Dual HV-SMPS Controller Interface Board
-
Axcelis
HV Module
543211
Power Supply, 110/220 Vac In, 380 Vdc Out, 2600 W
-
Axcelis
HV Module
394664
Power Supply, 85-187 Vac In, 350 Vdc Out, 2600 W
-
Axcelis
HV Module
394661
Power Supply, 85-187 Vac In, 350 Vdc Out, 2600 W
-
Axcelis
HV Module
210024
Power Supply, 110/220 Vac In, 380 Vdc Out, 2600 W
-
Axcelis
HV Module
544981
Transistor, Power, MOS
-
Axcelis
HV Module
244982
Transformer, HV Module Switching Power Supply
-
Axcelis
HV Module
26362
Switch, SPST N.C. Thermal, 185° Open, 170° Close, 120V, 12A
-
Axcelis
HV Module
441191
PWB Assembly, Control Board
-
Axcelis
HV Module
544401
PWB Assembly, Full Bridge Switching
-
Axcelis
HV Module
268751
PWB Assembly, Hexfet Board Switching Supply
-
Axcelis
HV Module
303022
PWB Assembly, HV Module HV Board
-
Axcelis
HV Module
280451
Harness Assembly, High Voltage
-
Axcelis
HV Module
279501
Harness Assembly, Thermal Switch
-
Axcelis
HV Module
549361
Harness Assembly, MOSFET HV Module
-
Axcelis
HV Module
279441
Harness Assembly, HV Module Hexfet Gate
-
Axcelis
HV Module
29221
Fan, Venturi, 100 cfm, 115V, 50/60 Hz
-
Axcelis
HV Module
76641
Compound, Silicone Heat Sink Thermal
-
Axcelis
HV Module
245491
Choke, SMPS HV Module, 25 mH
-
Axcelis
HV Module
279521
Cable Assembly, Voltage Sense
-
Axcelis
HV Module
280461
Cable Assembly, Ground
-
Axcelis
HV Module
279431
Cable Assembly, Current Sense
-
Axcelis
HV Module
549391
HV Module Assembly-SMPS
-
Axcelis
HV Module
268661
HV Module Assembly-SMPS
-
Axcelis
HV Module
451071
Harness Assembly, HVPS Power, U.S. Version
-
Axcelis
HV Module
451072
Harness Assembly, HVPS Power, European Version
-
Axcelis
HV Module
280372
Harness Assembly, HV SMPS Contactor, U.S. Version
-
Axcelis
HV Module
280374
Harness Assembly, HV SMPS Contactor, European Version
-
Axcelis
HV Module
279512
Harness Assembly, HV SMPS Transformer, U.S. Version
-
Axcelis
HV Module
279514
Harness Assembly, HV SMPS Transformer, European Version
-
Axcelis
HV Module
279481
Harness Assembly, HV SMPS Relay Control
-
Axcelis
HV Module
279471
Harness Assembly, HV SMPS Interlock Switch
-
Axcelis
HV Module
279462
Harness Assembly, HV SMPS HV Module Fan
-
Axcelis
HV Module
279452
Harness Assembly, HV SMPS High Voltage
-
Axcelis
HV Module
279422
Harness Assembly, HV SMPS Bulk Power Interlock
-
Axcelis
HV Module
279411
Harness Assembly, HV SMPS Bulk Power
-
Axcelis
HV Module
279402
Harness Assembly, HV SMPS AC Control
-
Axcelis
HV Module
281501
Harness Assembly, Inlet Flange, 10 PC, HV SMPS, U.S. Version
-
Axcelis
HV Module
281502
Harness Assembly, Inlet Flange, 10 PC, HV SMPS, Euro-pean Version
-
Axcelis
HV Module
451511
Harness Assembly, Filter, U.S. Version
-
Axcelis
HV Module
451512
Harness Assembly, Filter, European Version
-
Axcelis
HV Module
23493
Fuse, 2.5 A, 250 V, Single, .25 x 1.25 in, 3AG, SB
-
Axcelis
HV Module
284411
Contactor-Power, 4PST, 600V, 30A, Coil-24 Vdc
-
Axcelis
HV Module
280471
Cable Assembly, HV SMPS “A” HV Module Control
-
Axcelis
HV Module
279491
Cable Assembly, HV SMPS RF Detector
-
Axcelis
HV Module
279391
Cable Assembly, HV SMPS 24 Vdc
-
Axcelis
Gas Box
284761
Valve/Manifold Assembly, Gas Inlet
-
Axcelis
Gas Box
284362
Valve, Bellows, SS, NO, 2 Port, ¼ Female VCR, P/N SS- BNV51-O
-
Axcelis
Gas Box
284361
Valve, Bellows, SS, NC, 2 Port, ¼ Female VCR, P/N SS- BNV51-C
-
Axcelis
Gas Box
284351
Valve, Bellows Metering, P/N SS-4BMRG-VCR
-
Axcelis
Gas Box
284371
Valve, Bellows, 2 Port Butt Weld, ¼T, P/N 6LV-BNBW4-C
-
Axcelis
Gas Box
322443
Valve Assembly, Gasbox
-
Axcelis
Gas Box
322442
Valve Assembly, Gasbox
-
Axcelis
Gas Box
322441
Valve Assembly, Gasbox
-
Axcelis
Gas Box
286881
Valve Assembly, Extended Gas Inlet
-
Axcelis
Gas Box
321112
Valve Assembly, 6 Channel
-
Axcelis
Gas Box
321111
Valve Assembly, 6 Channel
-
Axcelis
Gas Box
287816
Tubing, Transparent Yellow Polyurethane, .12 OD x .06 ID
-
Axcelis
Gas Box
287812
Tubing, Transparent Red Polyurethane, .12 OD x .06 ID
-
Axcelis
Gas Box
287813
Tubing, Transparent Green Polyurethane, .12 OD x .06 ID
-
Axcelis
Gas Box
287814
Tubing, Transparent Blue Polyurethane, .12 OD x .06 ID
-
Axcelis
Gas Box
287801
Tubing, Opaque White Polyurethane, .12 OD x .06 ID
-
Axcelis
Gas Box
287802
Tubing, Opaque Purple Polyurethane, .12 OD x .06 ID
-
Axcelis
Gas Box
287807
Tubing, Opaque Neon Orange Polyurethane, .12 OD x .06 ID
-
Axcelis
Gas Box
33119
Tube, Gray Urethane, 105 psi, .125 ID x .250 OD
-
Axcelis
Gas Box
321131
Terminal Plug Assembly, Standard I/O
-
Axcelis
Gas Box
287051
Switch, Pressure, 40 psi
-
Axcelis
Gas Box
64234
Switch Assembly, Interlock
-
Axcelis
Gas Box
64231
Switch Assembly, Door Interlock, 2.5 Lb Force
-
Axcelis
Gas Box
287541
Retainer, Gasket Assembly, Modified, .009 Orifice
-
Axcelis
Gas Box
284442
Gasket Retainer Assembly
-
Axcelis
Gas Box
44791
Regulator, Air, 300 psi max, 50 psig max
-
Axcelis
Gas Box
344531
PWB Assembly, 6 MFC Gasbox Interface Board
-
Axcelis
Gas Box
392322
Harness Assembly, Pilot Valve
-
Axcelis
Gas Box
392321
Harness Assembly, Pilot Valve
-
Axcelis
Gas Box
392324
Harness Assembly, Pilot Valve
-
Axcelis
Gas Box
392323
Harness Assembly, Pilot Valve
-
Axcelis
Gas Box
407321
Gage, Pressure, 160 psi, SSTL
-
Axcelis
Gas Box
35204
Gage, Air Pressure, 0 to 30 psi, 1.5 Dia.
-
Axcelis
Gas Box
392421
Tubing Assembly, Foreline Purge In
-
Axcelis
Gas Box
392411
Tubing Assembly, N2 In
-
Axcelis
Gas Box
392371
Tubing Assembly, Gas 6 In
-
Axcelis
Gas Box
392381
Tubing Assembly, Gas 5 In
-
Axcelis
Gas Box
392351
Tubing Assembly, Gas 4 In
-
Axcelis
Gas Box
392361
Tubing Assembly, Gas 3 In
-
Axcelis
Gas Box
392391
Tubing Assembly, Gas 2 In
-
Axcelis
Gas Box
392401
Tubing Assembly, Gas 1 In
-
Axcelis
Gas Box
394492
Floor Facility, 6 Channel
-
Axcelis
Gas Box
394491
Floor Facility, 4 Channel
-
Axcelis
Gas Box
400481
Filter, Nickel Gas
-
Axcelis
Gas Box
286973
Filter, Inline Gas, ¼ VCR
-
Axcelis
Gas Box
286974
Filter, Gas, Inline, ¼ VCR
-
Axcelis
Gas Box
286971
Filter, Gas, Inline, ¼ VCR
-
Axcelis
Gas Box
392332
Detector Cable, End Point
