-
System
Module
Parts No.
Discription
Option
Short Name
-
Axcelis
Cassette Handler
258212
Lead Screw Assembly, Cassette Handler Upper
-
Axcelis
Cassette Handler
258214
Lead Screw Assembly, Cassette Handler Upper
-
Axcelis
Cassette Handler
258211
Lead Screw Assembly, Cassette Handler Lower
-
Axcelis
Cassette Handler
258213
Lead Screw Assembly, Cassette Handler Lower
-
Axcelis
Cassette Handler
259161
LED, Panel Mount Red, with Leads, 2V, 20 mA
-
Axcelis
Cassette Handler
303212
Harness Assembly, Right Platform Interconnect
-
Axcelis
Cassette Handler
303211
Harness Assembly, Left Platform Interconnect
-
Axcelis
Cassette Handler
423621
Cable, Wafer Detection Tower
-
Axcelis
Cassette Handler
259332
Cable Assembly, Right Rotate Interrupt
-
Axcelis
Cassette Handler
259331
Cable Assembly, Left Rotate Interrupt
-
Axcelis
Cassette Handler
259322
Cable Assembly, Right Motor Rotate
-
Axcelis
Cassette Handler
259321
Cable Assembly, Left Motor Rotate
-
Axcelis
Cassette Handler
259851
Bearing, Needle Roller
-
Axcelis
Card Case
344281
PWB Assembly, System Interface Card, Version II w/ISO SECS-II
-
Axcelis
Card Case
322391
PWB Assembly, Signal Tower Control Card
-
Axcelis
Card Case
343281
PWB Assembly, L/R Dual Serial Interface Board
-
Axcelis
Card Case
391232
PWB Assembly, Dual Chamber STD Bus I/O Extender Card
-
Axcelis
Card Case
391231
PWB Assembly, Dual Chamber STD Bus I/O Extender Card
-
Axcelis
Card Case
437581
PWB Assembly, 3-Axis Wafer Handler STD Card
-
Axcelis
Card Case
249251
PWB Assembly, 3-Axis Wafer Handler STD Card
-
Axcelis
Card Case
249181
PWB Assembly, Dual Cassette Handler Card
-
Axcelis
Baffle Plate
280891
Spacer, Upper Process Chamber, 6"/8” Wafer
-
Axcelis
Baffle Plate
280781
Spacer, Process Chamber Shower Head, 6"/8” Wafer
-
Axcelis
Baffle Plate
280731
Spacer, Process Chamber Quartz Ring, 6" Wafer
-
Axcelis
Baffle Plate
280252
Shower Head, Process Chamber Quartz, 8" Wafer
-
Axcelis
Baffle Plate
280251
Shower Head, Process Chamber Quartz, 6" Wafer
-
Axcelis
Baffle Plate
280812
Shower Head, Process Chamber Quartz Upper, 8" Wafer
-
Axcelis
Baffle Plate
280811
Shower Head, Process Chamber Quartz Upper, 6" Wafer
-
Axcelis
Baffle Plate
281041
Ring, Process Chamber Shower Lock, 6"/8” Wafer
-
Axcelis
Baffle Plate
280791
Retainer, Process Chamber Quartz, 6"/8” Wafer
-
Axcelis
Robot
58033
Belt, Timing, 0.080 Pitch, .380 Wide
-
Axcelis
Robot
58032
Belt, Timing, 0.080 Pitch, .380 Wide
-
Axcelis
Robot
200998
Belt, Drive Chain, 4mm Pitch, 73 Pitch
-
Axcelis
Robot
400721
Bearing, Radial Ball
-
Axcelis
Robot
88685
Bearing, Iglide Thrust, .5101 ID x .090 Lg x .8200 OD
-
Axcelis
Robot
88684
Bearing, Iglide Flanged, .251 ID x .250 Lg x .377 OD
-
Axcelis
Robot
204231
Bearing, Flanged Ball, .625 ID x .690 OD
-
Axcelis
Robot
204233
Bearing, Flanged Ball, .3125 ID x .5000 OD, Shielded
-
Axcelis
Robot
80972
Bearing, Flanged Ball, .250 ID
-
Axcelis
Robot
427871
Bearing, Double Row Ball, 1.2598 OD x .4724 ID x 0.625 W
-
Axcelis
Robot
431161
Bearing, Shielded Radial, .75 OD x .25 ID x .2812 W
-
Axcelis
Robot
247942
Bearing, Shielded Ball
-
Axcelis
Robot
247941
Bearing, Ball
-
Axcelis
Robot
96318
Bearing, Linear Slide
-
Axcelis
Robot
96317
Bearing, Linear Slide
-
Axcelis
Robot
96316
Bearing, Linear Slide
-
Axcelis
Robot
400362
Ball Screw Assembly, 3-Axis Robot
-
Axcelis
Robot
400361
Ball Screw Assembly, 3-Axis Robot
-
Axcelis
Robot
248762
Flag, Vertical Interrupt
-
Axcelis
Robot
249681
Flag, Rotating Interrupt
-
Axcelis
Robot
262291
Flag, Retract Interrupt
-
Axcelis
Robot
262292
Flag, Extend Interrupt
-
Axcelis
Robot
443991
Motor, Gear, 43:1 Ratio
-
Axcelis
Robot
81043
Motor, Gear, 76:1 Ratio
-
Axcelis
Robot
257625
Extend/Retract Assembly, Right Motor
-
Axcelis
Robot
257621
Extend/Retract Assembly, Right Motor
-
Axcelis
Robot
257626
Extend/Retract Assembly, Left Motor
-
Axcelis
Robot
257622
Extend/Retract Assembly, Left Motor1
-
Axcelis
Robot
247371
Encoder Wheel
-
Axcelis
Robot
471681
End Link
-
Axcelis
Robot
482331
E-Chain
-
Axcelis
Robot
401641
Cable/Tubing Assembly, Flexible (Obsolete)
-
Axcelis
Robot
549502
Cable Assembly, Left Emitter, CR672
-
Axcelis
Robot
251542
Cable Assembly, Left Emitter, CR672
-
Axcelis
Robot
549501
Cable Assembly, Right Emitter, CR671
-
Axcelis
Robot
251541
Cable Assembly, Right Emitter, CR671
-
Axcelis
Robot
257652
Cable Assembly, Opto Interrupt (Vertical)
-
Axcelis
Robot
257651
Cable Assembly, Opto Interrupt (Rotate)
-
Axcelis
Robot
257604
Cable Assembly, Opto Left Retract
-
Axcelis
Robot
257603
Cable Assembly, Opto Left Extend
-
Axcelis
Robot
257602
Cable Assembly, Opto Right Retract
-
Axcelis
Robot
257601
Cable Assembly, Opto Right Extend
-
Axcelis
Robot
251172
Cable Assembly, Coiled
-
Axcelis
Robot
251171
Cable Assembly, Coiled
-
Axcelis
Robot
249961
Bushing, Trantorque Keyless
-
Axcelis
Robot
429521
Bushing, Spring Tension
-
Axcelis
Robot
257641
Brake Assembly, Power Off
-
Axcelis
Robot
464913
Belt, Timing, 0.080 Pitch
-
Axcelis
Robot
464912
Belt, Timing, 0.080 Pitch
-
Axcelis
Robot
464911
Belt, Timing, 0.080 Pitch
-
Axcelis
Robot
58034
Belt, Timing, 0.080 Pitch, .380 Wide
-
Axcelis
Robot
248652
Wheel, Interrupt
-
Axcelis
Robot
248651
Wheel, Interrupt
-
Axcelis
Robot
457871
Washer, Teflon, .129 ID x .250 OD x .020 TK
-
Axcelis
Robot
400099
Washer, Belleville, .225 ID x .500 OD
-
Axcelis
Robot
400096
Washer, Belleville, .225 ID x .500 OD
-
Axcelis
Robot
400094
Washer, Belleville, .190 ID x .375 OD
-
Axcelis
Robot
400092
Washer, Belleville, .138 ID x .281 OD
-
Axcelis
Robot
400091
Washer, Belleville, .125 ID x .250 OD
-
Axcelis
Robot
88532
O-Ring, Silicone, 2-008, 0.176 ID x .070 Wide
-
Axcelis
Robot
469431
Wafer Pan Tip Assembly
-
Axcelis
Robot
250113
Tubing, Polyurethane, 0.187 OD x 0.125 ID
-
Axcelis
Robot
248851
Tubing, 3-Axis Robot Upper Platform Coiled
-
Axcelis
Robot
248842
Tubing, 3-Axis Robot Coiled
-
Axcelis
Robot
248841
Tubing, 3-Axis Robot Coiled
-
Axcelis
Robot
251351
Tube, Light Aperture
-
Axcelis
Robot
73053
Tape, Polyurethane
-
Axcelis
Robot
471741
Swivel, Cable Carrier
-
Axcelis
Robot
26353
Switch, Panel Mount SPST Limit, 12 Vac, 0.1A
-
Axcelis
Robot
434433
Motor, Double Shaft Stepper
