-
System
Module
Parts No.
Discription
Option
Short Name
-
Axcelis
Robot
434445
Stepper Motor Assembly, Vertical Motion
-
Axcelis
Robot
248772
Stepper Motor Modification, Long Shaft
-
Axcelis
Robot
257612
Stepper Motor Assembly, Vertical
-
Axcelis
Robot
443432
Motor, Single Shaft Stepper
-
Axcelis
Robot
434443
Stepper Motor Assembly, Rotary Motion
-
Axcelis
Robot
434433
Motor, Double Shaft Stepper
-
Axcelis
Robot
434444
Stepper Motor Assembly, Rotary Motion
-
Axcelis
Robot
248771
Stepper Motor Modification, Short Shaft
-
Axcelis
Robot
257611
Stepper Motor Assembly, Rotational
-
Axcelis
Robot
267211
Sprocket Assembly, 3-Axis Robot Idler
-
Axcelis
Robot
80942
Sprocket, Clamp Hub, 40T, 0.250 B
-
Axcelis
Robot
426811
Washer, Flat, SST
-
Axcelis
Robot
465051
Mount, Unitized Center Bolt
-
Axcelis
Robot
426791
Finger, Ring-Style Flex Mounting
-
Axcelis
Robot
426801
Finger, Bushing-Style Flex Mounting
-
Axcelis
Robot
427781
Bushing, 3-Axis Robot Resilient Mount
-
Axcelis
Robot
465684
Shim, Linear Rail Carriage, .002 TK
-
Axcelis
Robot
465683
Shim, Linear Rail Carriage, .002 TK
-
Axcelis
Robot
465682
Shim, Linear Rail Carriage, .004 TK
-
Axcelis
Robot
465681
Shim, Linear Rail Carriage, .002 TK
-
Axcelis
Robot
430171
Spring, Extension, SS, .500 ID x 1.50 Free Length
-
Axcelis
Robot
30062
Spring, Compression, 1.09 OD, 1.50 Free Length, SS, Pas- sivated
-
Axcelis
Robot
267421
Screw, Dynamic Column Adjustment
-
Axcelis
Robot
429291
PWB Assembly, 3-Axis Robot Base Board
-
Axcelis
Robot
249291
PWB Assembly, 3-Axis Robot Base Board
-
Axcelis
Robot
249331
PWB Assembly, 2 Head Wafer Transport Pan Interface Board
-
Axcelis
Robot
440271
Pulley Assembly, Optical Wheel
-
Axcelis
Robot
248692
Pulley, Vertical Drive, Modified
-
Axcelis
Robot
248691
Pulley, Vertical Drive, Modified
-
Axcelis
Robot
247933
Pulley, Timing Belt, .080 Pitch, .38", P.D. 1.528
-
Axcelis
Robot
247931
Pulley, Timing Belt, .080 Pitch, .38", P.D. 0.509
-
Axcelis
Robot
400601
Pulley, Rotation Drive, Modified
-
Axcelis
Robot
431031
Pulley, Fairloc Modification
-
Axcelis
Robot
259561
Plunger, Ball
-
Axcelis
Robot
414761
Lubricant, Isoflex Grease
-
Axcelis
Robot
72952
Loctite, Thread Adhesive
-
Axcelis
Robot
72951
Loctite, High Temperature
-
Axcelis
Robot
257631
Harness Assembly, 3-Axis Robot
-
Axcelis
Robot
258512
Guide, Dynamic Column
-
Axcelis
Robot
462381
Grease, Braycote 804
-
Axcelis
Robot
250271
Gear, Pinion, Brass, 32 Pitch, 26 Teeth
-
Axcelis
Robot
212742
Gear, Modified
-
Axcelis
Robot
247571
Gear, Bevel, Modification
-
Axcelis
Robot
249651
Flywheel, Vertical Drive
-
Axcelis
Robot
259411
Flywheel, Rotational Drive
-
Axcelis
Assembly
390521
Weldment Assembly, Gasbox Chamber
-
Axcelis
Assembly
393531
Watlow Control Assembly
-
Axcelis
Assembly
398761
Watlow Control Assembly, U.S. Version
-
Axcelis
Assembly
398762
Watlow Control Assembly, European Version
-
Axcelis
Assembly
397141
Vacuum Assembly, Right
-
Axcelis
Assembly
385811
Vacuum Assembly, Right
-
Axcelis
Assembly
397151
Vacuum Assembly, Left
-
Axcelis
Assembly
385801
Vacuum Assembly, Left
-
Axcelis
Assembly
342741
Utility Panel Assembly
-
Axcelis
Assembly
319321
Transformer, Regulating, 500 VA, 60 Hz
-
Axcelis
Assembly
319322
Transformer, Regulating, 500 VA, 50 Hz
-
Axcelis
Assembly
437601
SMIF Cassette Platform
-
Axcelis
Assembly
498771
SMIF Cassette Handler
-
Axcelis
Assembly
426001
SMIF Bulkhead Assembly
-
Axcelis
Assembly
497411
Signal Tower, Rear
-
Axcelis
Assembly
403121
Signal Tower, Rear
-
Axcelis
Assembly
423592
Signal Tower, 2 Slimline 3-Light
-
Axcelis
Assembly
423604
Signal Tower, 2 Low Profile 4-Light
-
Axcelis
Assembly
423603
Signal Tower, 2 Low Profile 3-Light
-
Axcelis
Assembly
423591
Signal Tower, 1 Slimline 3-Light
-
Axcelis
Assembly
423602
Signal Tower, 1 Low Profile 4-Light
-
Axcelis
Assembly
423601
Signal Tower, 1 Low Profile 3-Light
-
Axcelis
Assembly
398133
Rear Display Assembly
-
Axcelis
Assembly
398131
Rear Display Assembly
-
Axcelis
Assembly
342481
Process Chamber Assembly, Right
-
Axcelis
Assembly
342482
Process Chamber Assembly, Left
-
Axcelis
Assembly
318526
Power Distribution Panel Assembly, Samsung Version
-
Axcelis
Assembly
318521
Power Distribution Panel Assembly, U.S. Version
-
Axcelis
Assembly
318525
Power Distribution Panel Assembly, Netherlands Version
-
Axcelis
Assembly
318523
Power Distribution Panel Assembly, Japanese 60 Hz Version
-
Axcelis
Assembly
318524
Power Distribution Panel Assembly, Japanese 50 Hz Version
-
Axcelis
Assembly
318522
Power Distribution Panel Assembly, European Version
-
Axcelis
Assembly
441463
Power Distribution Box, U.S. Version
-
Axcelis
Assembly
441462
Power Distribution Box, Netherlands Version
-
Axcelis
Assembly
441464
Power Distribution Box, Japanese Version
-
Axcelis
Assembly
441461
Power Distribution Box, European Version
-
Axcelis
Assembly
396551
Plasma Generator Assembly, Right
-
Axcelis
Assembly
396541
Plasma Generator Assembly, Left
-
Axcelis
Assembly
568911
P.C. Assembly
-
Axcelis
Assembly
462431
P.C. Assembly
-
Axcelis
Assembly
428401
P.C. Assembly
-
Axcelis
Assembly
390881
P.C. Assembly
-
Axcelis
Assembly
424511
Mini-Environment Open Configuration
-
Axcelis
Assembly
424521
Mini-Environment Configuration, U.S./Japanese Version
-
Axcelis
Assembly
424523
Mini-Environment Configuration, Japanese 50 Hz Version
-
Axcelis
Assembly
424522
Mini-Environment Configuration, European Version
-
Axcelis
Assembly
321641
Microwave Assembly, Right
-
Axcelis
Assembly
321642
Microwave Assembly, Left
-
Axcelis
Assembly
537961
Lamp Control Box Assembly, U.S. Version
-
Axcelis
Assembly
342501
Lamp Control Box Assembly, U.S. Version
-
Axcelis
Assembly
537962
Lamp Control Box Assembly, European Version
-
Axcelis
Assembly
342502
Lamp Control Box Assembly, European Version
-
Axcelis
Assembly
434471
Kit, Surge Limiting Resistor
-
Axcelis
Assembly
389073
High Voltage SMPS Assembly, Left, U.S. Version
-
Axcelis
Assembly
389071
High Voltage SMPS Assembly, Right, U.S. Version
