본문
Other Module and Parts
■ All Parts Supplied with New One
- DPS DTCU Hoist Lift Assembly
- Metal and Poly Lower / Upper Chamber Assembly
- MxP / MxP+ / WxP Chamber Wall Assembly
- Buffer Lid
- DPS DTCU Assembly (R1, E-DTCU, ES, HR)
- System Rack All Board
- AC / DC Power Supply
- Gas Panel Assembly
- All Valves and Indicators
- All Sensor and Bracket
- Provide all about parts for Control Rack
- Provide all about parts for AC Rack
- Provide all about parts for Generator Rack
상세정보
- 150/200mm assembly can be supplied.
- Construct the module using verified parts.
- We manufacture and supply modules using new parts.
- We can supply stable parts through numerous tests.
- Repairs and modifications are possible according to customer needs.
- Production and testing are possible according to customer requirements.
- We propose and supply modules with improved performance to customers.