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Centura5200 DPS Poly
Configuration | Poly |
Main Frame | Centura5200 I, II |
Chamber A, B | DPS / DPS+ |
Chamber C or D | DPS / DPS+ |
Chamber E | N/A |
Chamber F | Orient |
Loadlock | Narrow Body / Wide Body |
System Controller | 66" Standard Controller |
AC Rack | 81" Standard Controller |
Operation Robot | HP/HP+ or VHP/VHP+ |
Gate Valve | VAT Valve |
Turbo Pump | STP2203 |
Wafer Size | 150 / 200mm |
상세정보
- 150/200mm conversion and process provided.
- Clean Room Operation.
- Manufacture and refurbishment are possible for All Model.
- We can provide solutions tailored to customer needs.
- Chamber Add-on and Retrofit can be provided.
- Module assembly can be provided.