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Axcelis ISO Valve with Slow Pump
■ Axcelis Fusion System ISO Valve with Slow Pump
- All Parts Supplied with New One
- Applicable to Fusion Series
- All parts Pump Station can be supplied
- Simplifying setup and reducing costs
- It can prevent Quartz from being broken and protect the Foreline
- Turbulent flow is diminished preventing contamination buildup and damage
- In the first, the bypass valve pumps down slowly
- In the second, the main valve opens
상세정보
- Construct the module using verified parts.
- We manufacture and supply modules using new parts.
- We can supply stable parts through numerous tests.
- Repairs and modifications are possible according to customer needs.
- Production and testing are possible according to customer requirements.
- We propose and supply modules with improved performance to customers.